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CAS IR Grid
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长春光学精密机械与物... [1]
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OAI收割 [1]
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会议论文 [1]
发表日期
2007 [1]
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Large aperture low threshold current 980nmVCSELs fabricated with pulsed anodic oxidation (EI CONFERENCE)
会议论文
OAI收割
Optoelectronic Materials and Devices II, November 2, 2007 - November 5, 2007, Wuhan, China
Jinjiang C.
;
Yongqiang N.
;
Te L.
;
Guangyu L.
;
Yan Z.
;
Biao P.
;
Yanfang S.
;
Lijun W.
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提交时间:2013/03/25
Pulsed anodic oxidation technique
a new way of forming current blocking layers
was successfully used in ridge-waveguide QW laser fabrication. We apply this method in 980nm VCSELs fabrication to form a high-quality native oxide current blocking layer
which simplify the device process. A significant reduction of threshold current and a distinguished device performance are achieved. The 500m-diameter device has a current threshold as low as 0.48W. The maximum CW operation output power at room temperature is 1.48W. The lateral divergence angle //and vertical divergence angle are as low as 15.3 and 13.8 without side-lobes at a current of 6A.