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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
合肥物质科学研究院 [2]
长春光学精密机械与物... [1]
半导体研究所 [1]
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OAI收割 [4]
内容类型
期刊论文 [3]
会议论文 [1]
发表日期
2018 [1]
2017 [1]
2005 [1]
1993 [1]
学科主题
半导体材料 [1]
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Generation of reactive species in atmospheric pressure dielectric barrier discharge with liquid water
期刊论文
OAI收割
PLASMA SCIENCE & TECHNOLOGY, 2018, 卷号: 20, 期号: 4, 页码: 6
作者:
Zhang, Zelong
;
Shen, Jie
;
Cheng, Cheng
;
Xu, Zimu
;
Xia, Weidong
  |  
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2019/06/10
atmosphere pressure dielectric barrier discharge plasma
gas-liquid discharge
electrical characteristics
reactive species
Bactericidal Effects of Plasma Induced Reactive Species in Dielectric Barrier Gas-Liquid Discharge
期刊论文
OAI收割
PLASMA CHEMISTRY AND PLASMA PROCESSING, 2017, 卷号: 37, 期号: 2, 页码: 415-431
作者:
Zhang, Zelong
;
Xu, Zimu
;
Cheng, Cheng
;
Wei, Jun
;
Lan, Yan
收藏
  |  
浏览/下载:37/0
  |  
提交时间:2018/07/04
Atmosphere Dielectric Barrier Discharge Plasma
Bacteria Inactivation
Bactericidal Efficiency
Initial Damage
Reactive Species
Vacuum annealing effects on properties of ITO films prepared by reactive low voltage ion plating technique (EI CONFERENCE)
会议论文
OAI收割
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
作者:
Wang X.
;
Wang X.
;
Wang X.
;
Zheng X.
;
Gao J.
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2013/03/25
With reactive low voltage ion plating technique
ITO (indium oxide doped with tin) films were deposited on glass substrates by using ITO pellet with a composition of 90 wt.% In2O3 and 10 wt.% SnO2 without extra heating. The post annealing process was done in vacuum with different annealing temperature at 100
200
300 and 400C for 2 hours
respectively. The effects of vacuum annealing on structural
optical and electrical properties of the ITO film deposited by RLVIP were studied in detail. The results showed that the crystalline of the film was improved with the higher temperature. The increase of the annealing temperature improved the infrared reflectivity from 30% to 80% over 8-14m of the infrared atmosphere window
and a simultaneous variation in the optical transmission of the visible spectral region occurred. In addition
sheet resistance of ITO films had contrary changing trend with the IR reflectance
as well.
EXCIMER-LASER DOPING OF SPIN-ON DOPANT IN SILICON
期刊论文
OAI收割
applied surface science, 1993, 卷号: 64, 期号: 3, 页码: 259-263
WONG YW
;
YANG XQ
;
CHAN PW
;
TONG KY
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  |  
浏览/下载:175/0
  |  
提交时间:2010/11/15
REACTIVE ATMOSPHERE
BORON
IRRADIATION
SEMICONDUCTORS
JUNCTIONS