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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
半导体研究所 [3]
长春光学精密机械与物... [1]
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OAI收割 [3]
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期刊论文 [3]
会议论文 [1]
发表日期
2011 [3]
2006 [1]
学科主题
光电子学 [2]
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An electrical-filtered optical heterodyne technique for tuning speed measurement of dbr lasers
期刊论文
iSwitch采集
Chinese science bulletin, 2011, 卷号: 56, 期号: 7, 页码: 704-708
作者:
Man JiangWei
;
Zhu NingHua
;
Zhang HongGuang
;
Sun Ke
;
Ke JianHong
收藏
  |  
浏览/下载:30/0
  |  
提交时间:2019/05/12
Dbr laser
Electrical filter
Square-wave tuning
Tuning speed
Wavelength switching
Wavelength-Tunable Si-Based InGaAs Resonant Cavity Enhanced Photodetectors Using Sol-Gel Wafer Bonding Technology
期刊论文
OAI收割
ieee photonics technology letters, 2011, 卷号: 23, 期号: 13, 页码: 881-883
作者:
Cao Q
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  |  
浏览/下载:69/5
  |  
提交时间:2011/07/05
Resonant cavity enhanced (RCE) photodetector
silicon photonics
sol-gel wafer bonding
thermal tuning
INTERFACIAL ENERGY
SILICON-WAFERS
HIGH-SPEED
TEMPERATURE
PHOTODIODES
MORPHOLOGY
POWER
An electrical-filtered optical heterodyne technique for tuning speed measurement of DBR lasers
期刊论文
OAI收割
chinese science bulletin, 2011, 卷号: 56, 期号: 7, 页码: 704-708
作者:
Man JW
;
Ke JH
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  |  
浏览/下载:74/3
  |  
提交时间:2011/07/05
DBR laser
electrical filter
square-wave tuning
tuning speed
wavelength switching
TUNABLE LASER
WAVELENGTH
TRANSMITTER
DFB
Key techniques of laser direct writing of fine lines on the spherical surface (EI CONFERENCE)
会议论文
OAI收割
ICO20: Optical Design and Fabrication, August 21, 2005 - August 26, 2005, Changchun, China
Liang F.
;
Hu J.
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  |  
浏览/下载:21/0
  |  
提交时间:2013/03/25
The main principles of laser direct writing (LDW) system for lines on the spherical surface (SS) are discussed. It is pointed out that line profile is determined by the exposure dose distribution
which lies on the light intensity distribution of focus plane and the scanning speed. To improve the quality of line profile on the SS
several key techniques as follows are introduced. Firstly
the unique system configuration
four axes mutually intersecting at the center of the SS
is adopted
which ensures the shape of the focus be maintained circular during the writing period. Secondly
an automatic focus system (AFS) with the function of automatic focus in a certain range is introduced. Thirdly
to guarantee the linear velocity to accord with the exposure character of the photoresist all the time
an efficient arithmetic that controls motors run at appropriate angular velocity in different latitude is developed. Finally
to achieve a stable and well-behaved system so as to compensate the velocity instability resulting from unavoidable errors of mechanical and electronics factor
a powerful programmable multi-axis controller (PMAC) is utilized as the kernel element of the servocontrol system
and the curves of step response and parabolic response achieved by feedforward and PID loop tuning indicate that the location precision and velocity stability have reached a high level. The experimental results of LDW of lines on the SS work piece with a diameter 30 mm and a radius equal to 100 mm are given. The section analysis of the lines on the photoresist by the atomic force microscope (AFM) after exposure and development is performed. The results show that line width is about 3.0 m
and the steep sides of the lines are parallel to each other.