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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
长春光学精密机械与物... [2]
计算技术研究所 [1]
中国科学院大学 [1]
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OAI收割 [3]
iSwitch采集 [1]
内容类型
会议论文 [2]
期刊论文 [2]
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2011 [1]
2009 [1]
2008 [2]
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Roughness analysis of optical surfaces by X-ray scattering (EI CONFERENCE)
会议论文
OAI收割
2011 International Conference on Electronics and Optoelectronics, ICEOE 2011, July 29, 2011 - July 31, 2011, Dalian, China
作者:
Chen B.
;
Chen B.
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2013/03/25
A grazing incidence x-ray scattering (XRS) method
Order perturbation theory (FOPT)
is stated briefly and an experimental facility based on an improved X-ray diffraction has been introduced
which can work with high performance. The x-ray scattering distributions of two super smooth silicon samples measured at the incidence angle 0.2 degree
as the x-ray wavelength is 0.154 nm
have been given and analyzed by the FOPT to give information about the surface profiles. As a comparison
the root mean square (RMS) surface roughness
grey-scale maps and one-dimensional power spectral density (1D PSD) have been derived from the atomic-force microscope (AFM) data. The results evaluated by FOPT are in good agreement with that of AFM
which indicates that x-ray scattering method is a practical characterization for the investigation of super smooth surfaces. 2011 IEEE.
Assessment of surface roughness by use of soft x-ray scattering (EI CONFERENCE)
会议论文
OAI收割
Soft X-Ray Lasers and Applications VIII, August 4, 2009 - August 6, 2009, San Diego, CA, United states
Yan-li M.
;
Yong-gang W.
;
Shu-yan C.
;
Bo C.
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  |  
浏览/下载:29/0
  |  
提交时间:2013/03/25
A soft x-ray reflectometer with laser produced plasma source has been designed
which can work from wavelength 8nm to 30 nm and has high performance. Using the soft x-ray reflectometer above
the scattering light distribution of silicon and zerodur mirrors which have super-smooth surfaces could be measured at different incidence angle and different wavelength. The measurement when the incidence angle is 2 degree and the wavelength is 1 lnm has been given in this paper. A surface scattering theory of soft x-ray grazing incidence optics based on linear system theory and an inverse scattering mathematical model is introduced. The vector scattering theory of soft x-ray scattering also is stated in detail. The scattering data are analyzed by both the methods above respectively to give information about the surface profiles. On the other hand
both the two samples are measured by WYKO surface profiler
and the surface roughness of the silicon and zerodur mirror is 1.3 nm and 1.5nm respectively. The calculated results are in quantitative agreement with those measured by WYKO surface profiler
which indicates that soft x-ray scattering is a very useful tool for the evaluation of highly polished surfaces. But there still some difference among the results of different theory and WYKO
and the possible reasons of such difference have been discussed in detail. 2009 SPIE.
Making effective decisions in computer architects' real-world: lessons and experiences with godson-2 processor designs
期刊论文
iSwitch采集
Journal of computer science and technology, 2008, 卷号: 23, 期号: 4, 页码: 620-632
作者:
Hu, Wei-Wu
;
Wang, Jian
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2019/05/10
Superscalar architecture
Correlation design
Balanced design
Optimized design
Pico-architecture design
Work-on-silicon
Making effective decisions in computer architects' real-world: Lessons and experiences with Godson-2 processor designs
期刊论文
OAI收割
JOURNAL OF COMPUTER SCIENCE AND TECHNOLOGY, 2008, 卷号: 23, 期号: 4, 页码: 620-632
作者:
Hu, Wei-Wu
;
Wang, Jian
  |  
收藏
  |  
浏览/下载:36/0
  |  
提交时间:2019/12/16
superscalar architecture
correlation design
balanced design
optimized design
pico-architecture design
work-on-silicon