中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
首页
机构
成果
学者
登录
注册
登陆
×
验证码:
换一张
忘记密码?
记住我
×
校外用户登录
CAS IR Grid
机构
长春光学精密机械与物... [1]
自动化研究所 [1]
采集方式
OAI收割 [2]
内容类型
会议论文 [1]
学位论文 [1]
发表日期
2011 [1]
2006 [1]
学科主题
筛选
浏览/检索结果:
共2条,第1-2条
帮助
条数/页:
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
排序方式:
请选择
题名升序
题名降序
提交时间升序
提交时间降序
作者升序
作者降序
发表日期升序
发表日期降序
装配机器人系统的工件定位和抓取装配研究
学位论文
OAI收割
工学博士, 中国科学院自动化研究所: 中国科学院研究生院, 2011
作者:
赵广涛
收藏
  |  
浏览/下载:211/0
  |  
提交时间:2015/09/02
装配机器人
目标检测
三维工件定位
图像矩
抓取点提取
Assembly robot
Target recognition
Work-piece location
Image moment
Extraction of the grasp point
Key techniques of laser direct writing of fine lines on the spherical surface (EI CONFERENCE)
会议论文
OAI收割
ICO20: Optical Design and Fabrication, August 21, 2005 - August 26, 2005, Changchun, China
Liang F.
;
Hu J.
收藏
  |  
浏览/下载:21/0
  |  
提交时间:2013/03/25
The main principles of laser direct writing (LDW) system for lines on the spherical surface (SS) are discussed. It is pointed out that line profile is determined by the exposure dose distribution
which lies on the light intensity distribution of focus plane and the scanning speed. To improve the quality of line profile on the SS
several key techniques as follows are introduced. Firstly
the unique system configuration
four axes mutually intersecting at the center of the SS
is adopted
which ensures the shape of the focus be maintained circular during the writing period. Secondly
an automatic focus system (AFS) with the function of automatic focus in a certain range is introduced. Thirdly
to guarantee the linear velocity to accord with the exposure character of the photoresist all the time
an efficient arithmetic that controls motors run at appropriate angular velocity in different latitude is developed. Finally
to achieve a stable and well-behaved system so as to compensate the velocity instability resulting from unavoidable errors of mechanical and electronics factor
a powerful programmable multi-axis controller (PMAC) is utilized as the kernel element of the servocontrol system
and the curves of step response and parabolic response achieved by feedforward and PID loop tuning indicate that the location precision and velocity stability have reached a high level. The experimental results of LDW of lines on the SS work piece with a diameter 30 mm and a radius equal to 100 mm are given. The section analysis of the lines on the photoresist by the atomic force microscope (AFM) after exposure and development is performed. The results show that line width is about 3.0 m
and the steep sides of the lines are parallel to each other.