机构

• 长春光学精密机械与物... [1]

采集方式

• OAI收割 [1]

内容类型

• 会议论文 [1]

发表日期

• 2012 [1]

学科主题

筛选

浏览/检索结果: 共1条，第1-1条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Nanoscale patterns made by using a 13.5-nm Schwarzschild objective and a laser produced plasma source (EI CONFERENCE) 会议论文  OAI收割 Optical Micro- and Nanometrology IV, April 16, 2012 - April 18, 2012, Brussels, Belgium 作者:  Wang X.;  Wang X.;  Wang X.;  Wang Z.;  Wang Z. 收藏  |  浏览/下载：37/0  |  提交时间：2013/03/25 Lithium fluoride (LiF) crystal is a very promising candidate as nanometer resolution EUV and soft X-ray detector. Compared with other EUV and soft X-ray detectors  charge coupled device and photographic films  LiF crystal has high resolution  large field of view and wide dynamic range. In this paper  using LiF crystal as EUV detector and a Schwarzschild objective (SO) working at 13.5nm as projection optics  mesh images with 4.2 m  1.2 m and 800 nm line width and pinhole patterns with 1.5m diameter are acquired in projection imaging mode and direct writing mode  respectively. Fluorescence intensity profiles of images show that the resolution of mesh image is 900 nm  and the one of pinhole image is 800 nm. In the experiments  a spherical condense mirror based on normal incidence type is used to eliminate the damage and contamination on the masks (mesh and pinhole) caused by the laser plasma  and the energy density is not decreased compared with that the masks are close to the plasma. The development of the SO  the alignment of the objective and the imaging experiments are also reported. 2012 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).