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Testing convex hyperbolic mirrors with two or more annuluses by Hindle and stitching methods 期刊论文  OAI收割
OPTICS AND LASERS IN ENGINEERING, 2014, 卷号: 61, 页码: 52-56
作者:  
Yan, Fengtao;  Fan, Bin;  Hou, Xi;  Wu, Fan
收藏  |  浏览/下载:35/0  |  提交时间:2015/07/10
Measurement of large convex hyperbolic mirrors using hindle and stitching methods 期刊论文  OAI收割
OPTICS AND LASERS IN ENGINEERING, 2013, 卷号: 51, 期号: 7, 页码: 856-860
作者:  
Yan, Fengtao;  Fan, Bin;  Hou, Xi;  Wu, Fan
收藏  |  浏览/下载:26/0  |  提交时间:2015/04/17
Null compensator testing convex freeform surface mirror with CGH technology (EI CONFERENCE) 会议论文  OAI收割
2012 International Conference on Future Optical Materials and Circuit Design, FOMCD 2012, December 27, 2012 - December 28, 2012, Xiamen, China
作者:  
Zhang Z.-Y.;  Zhang Z.-Y.;  Zhang B.-Z.
收藏  |  浏览/下载:27/0  |  提交时间:2013/03/25
A fast approach to deformable surface 3D tracking 期刊论文  OAI收割
PATTERN RECOGNITION, 2011, 卷号: 44, 期号: 12, 页码: 2915-2925
作者:  
Wang, Chenhao;  Shen, Shuhan;  Liu, Yuncai
收藏  |  浏览/下载:24/0  |  提交时间:2015/08/12
Numerical Simulation of Flow and Heat Transfer from Slot Jets Impinging on a Cylindrical Convex Surface 期刊论文  OAI收割
JOURNAL OF THERMAL SCIENCE, 2011, 卷号: 20, 期号: 5, 页码: 460,466
Zeyi JIANG1*, Cuicui LIU1; Xinxin ZHANG1; Qiang MA 2; Yusheng SUN 2
收藏  |  浏览/下载:14/0  |  提交时间:2012/12/20
Design and tolerance analysis of compensator for high order aspheric surface testing (EI CONFERENCE) 会议论文  OAI收割
2009 International Conference on Optical Instruments and Technology - Optoelectronic Measurement Technology and Systems, October 19, 2009 - October 22, 2009, Shanghai, China
作者:  
Chen X.;  Liu W.;  Chen X.;  Chen X.
收藏  |  浏览/下载:27/0  |  提交时间:2013/03/25
High accuracy is required in surface testing of 90nm nodal point lithography projecting lens. By comparing various aspheric surface testing methods  the structure layout of the compensator is a meniscus positive lens combined with a Plano-convex positive lens. The design results indicate that: primary and high order aberrations are balanced well  we adopt Offner null compensator to test the aspheric surface in the point diffraction interferometer at last. In this paper  MTF exceeds diffraction limit  an Offner compensator is presented on the base of the third order aberration theory to test concave aspheric surface  root-mean-square (RMS) of wave front error /167. The F-number of the system can achieve F/1.64. By the analysis of the process of aspheric surface testing with the designed system  the optical construction parameters of which is determined by introducing equal-quantities spherical aberration to compensate all orders of aspheric coefficients. The field of view of the system is 0.02  a loosen distribution of the tolerance was presented based on the accuracy of measuring apparatus. 2009 SPIE.