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CAS IR Grid
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长春光学精密机械与物... [1]
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OAI收割 [1]
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会议论文 [1]
发表日期
2005 [1]
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Imaging quality analysis of KBA x-ray microscope working at grazing incidence (EI CONFERENCE)
会议论文
OAI收割
Optical Design and Testing II, November 8, 2004 - November 11, 2004, Beijing, United states
作者:
Zhao L.
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提交时间:2013/03/25
In the latest 20 years
x-ray imaging technology has developed fast in order to meet the need of x-ray photo-etching
spatial exploration technology
high-energy physics
procedure diagnosis of inertial confinement fusion (ICF) et al. Since refractive index of materials in the x-ray region is lower than 1
and x-ray is strongly absorbed by materials
it is very difficult to image objects in the x-ray region. Conventional imaging methods are hardly suitable to x-ray range. In general
grazing reflective imaging and coding aperture imaging methods have been adopted more and more. In this paper
according to user's requirement
we have designed a non-coaxial grazing KBA microscope. The microscope consists of two sets of perpendicular spherical mirrors
each set includes two parallel mirrors. Taking it as an example
we have compiled an optical computing program for the non-coaxial grazing imaging systems so as to analyze and evaluate aberrations of KBA microscope. Thus it can help us to get an optimal comprehension of KBA x-ray imaging system. In the same time
the analytical results provide reliable foundation for evaluating imaging quality of KBA microscope.