机构

• 合肥物质科学研究院 [2]
• 长春光学精密机械与物... [1]
• 上海微系统与信息技术... [1]

采集方式

• OAI收割 [4]

内容类型

• 期刊论文 [3]
• 会议论文 [1]

发表日期

• 2022 [2]
• 2012 [1]
• 2006 [1]

学科主题

• Engineerin... [1]

筛选

浏览/检索结果: 共4条，第1-4条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序作者升序作者降序 Fabrication of Pt-Ag-Au heterogeneous truncated hollow sub-microspheres for chemically self-propelled colloidal motors 期刊论文  OAI收割 NANO FUTURES, 2022, 卷号: 6 作者:  Yi Wei;  Qian Zhao;  Zhang, Hongwen;  Le Zhou;  Cai, Weiping   |  收藏  |  浏览/下载：31/0  |  提交时间：2022/12/23 truncated hollow sub-microspheres  Pt-Ag-Au multilayer nanoshells  template etching and isotropic deposition  chemically propelled colloidal motors   Fabrication of Pt–Ag–Au heterogeneous truncated hollow sub-microspheres for chemically self-propelled colloidal motors 期刊论文  OAI收割 Nano Futures, 2022, 卷号: 6 作者:  Wei,Yi;  Zhao,Qian;  Zhang,Hongwen;  Zhou,Le;  Cai,Weiping   |  收藏  |  浏览/下载：45/0  |  提交时间：2022/12/22 truncated hollow sub-microspheres  Pt–Ag–Au multilayer nanoshells  template etching and isotropic deposition  chemically propelled colloidal motors   Isotropic Silicon Etching With XeF2 Gas for Wafer-Level Micromachining Applications 期刊论文  OAI收割 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 卷号: 21, 期号: 6, 页码: 1436-1444 Xu, DH; Xiong, B; Wu, GQ; Wang, YC; Sun, X; Wang, YL 收藏  |  浏览/下载：23/0  |  提交时间：2013/04/23 Design rule  isotropic etching  microelectromechanical systems (MEMS)  micromachining  wafer level  XeF2 gas   Study on the fabrication of orange micro-LED arrays for display (EI CONFERENCE) 会议论文  OAI收割 ICO20: Display Devices and Systems, August 21, 2005 - August 26, 2005, Changchun, China 作者:  Li J.;  Wang W.;  Wang W.;  Zhao L.;  Li J. 收藏  |  浏览/下载：37/0  |  提交时间：2013/03/25 Arrays of micro-sized LEDs which can be used as microdisplays have been demonstrated in recent years. In order to reduce the input and output connections to the arrays  we employ a matrix addressable architecture  in which all the pixels in each row are connected by a common metal line on the top of the window layer (top electrode) or at the base of substrate(bottom electrode). Decreasing the size of electrodes makes for minimizing the size of device. The optic and electric isolation and good ohmic contact are also helpful to obtain superior optical and electrical performance. We describe a procedure of fabrication of AlGalnP-based orange micro-LED by wet etching. The structure of devices is etched using both isotropic and anisotropic etchant. The pixel size is about 16um 20um  and there are 1000 818 pixels in the light emitting chip whose diagonal is 1-in.