机构

• 力学研究所 [1]
• 长春光学精密机械与物... [1]
• 上海应用物理研究所 [1]
• 高能物理研究所 [1]

采集方式

• OAI收割 [4]

内容类型

• 会议论文 [2]
• 期刊论文 [2]

发表日期

• 2016 [1]
• 2015 [1]
• 2010 [2]

学科主题

• Instrument... [1]

筛选

浏览/检索结果: 共4条，第1-4条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Nano-accuracy measurement technology of optical-surface profiles 会议论文  OAI收割 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics, Suzhou, PEOPLES R CHINA, APR 26-29, 2016 作者:  Qian, SN;  Gao, B 收藏  |  浏览/下载：24/0  |  提交时间：2017/03/02 surface profiler  profilometer  nano-accuracy  preccise measurement   Approaching sub-50 nanoradian measurements by reducing the saw-tooth deviation of the autocollimator in the Nano-Optic-Measuring Machine 期刊论文  OAI收割 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2015, 卷号: 785, 页码: 206-212 作者:  Qian, SN;  Geckeler, RD;  Just, A;  Idir, M;  Wu, XH 收藏  |  浏览/下载：19/0  |  提交时间：2016/04/18 Nano-accuracy metrology  Optical surface measurements  Figure  Synchrotron radiation   White-light spectral scanning interferometry for surface measurement system (EI CONFERENCE) 会议论文  OAI收割 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China 作者:  Wang C. 收藏  |  浏览/下载：26/0  |  提交时间：2013/03/25 The paper introduces the white-light spectral scanning interferometry for surface measurement. This interferometry can be used to measure the roughness of both smooth surfaces and those with large step heights. This real-time surface measurement can be achieved using acousto-optic tuneable filtering (AOTF) technique without mechanical scanning. At first  the structure and principle of this interferometry is introduced. Then the algorithm of the surface roughness measurement is proposed. What's more  the experiment with standard test piece is conducted. Compared with the traditional laser-light interferometry  the data shows that the proposed method has a higher accuracy which is proved to be nano-scale. A conclusion is given at last in which the superiorities and the limitations of the proposed system were discussed. 2010 SPIE.   Analysis of the practical force accuracy of electromagnet-based nanoindenters 期刊论文  OAI收割 Measurement, 2010, 卷号: 43, 期号: 9, 页码: 1090-1093 作者:  Huan Y(郇勇);  Liu DX(刘东旭);  Yang R(杨荣);  Zhang TH(张泰华);  Zhang TH 收藏  |  浏览/下载：55/0  |  提交时间：2011/03/01 Nanoindenter  Force  Accuracy  Measurement  Nano-Indentation  Indenter