机构

• 长春光学精密机械与物... [2]

采集方式

• OAI收割 [2]

内容类型

• 会议论文 [2]

发表日期

• 2011 [1]
• 2009 [1]

学科主题

筛选

浏览/检索结果: 共2条，第1-2条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 The angular velocity estimation principal of -- filter based on high sampling rate (EI CONFERENCE) 会议论文  OAI收割 2011 2nd International Conference on Mechanic Automation and Control Engineering, MACE 2011, July 15, 2011 - July 17, 2011, Inner Mongolia, China 作者:  Zhang Y. 收藏  |  浏览/下载：31/0  |  提交时间：2013/03/25 In order to get angular velocity of stabilization servo mechanism from angular position sensors  -- filter and its angular velocity transfer function were predigested. Combing with optimum parameters  -- filter based on high sampling rate was established  the effect of and sample rate on filter nature frequency were evaluated. According to the requirements of stabilization platform  the principle of steady and transient tracking filter differential were proved. With the hypothesis of constant acceleration  the frequency characteristics of angular velocity transfer function were analyzed  three-dimensional Kalman filter was simplified  and the filter parameters were designed. The results show that when the spectrum of input signal was lower than 6rad/s  parameters was 0.02  and sampling period were 0.08ms and 0.1ms respectively  the filter can realize differential exactly  when the spectrum was 9rad/s  the precision was no less than 1.1%  the phase leading of angular position was no less than 70  the natural frequency should be higher than the cut-off frequency of stabilization platform was two or three times. In the engineering of electro-optical stabilization servo mechanism  -- filter has properties of tracking differential  and reached the requirement of platform angular velocity estimation. Also it is one of the effective methods to get angular velocity from angular position sensors. 2011 IEEE.   Design and tolerance analysis of compensator for high order aspheric surface testing (EI CONFERENCE) 会议论文  OAI收割 2009 International Conference on Optical Instruments and Technology - Optoelectronic Measurement Technology and Systems, October 19, 2009 - October 22, 2009, Shanghai, China 作者:  Chen X.;  Liu W.;  Chen X.;  Chen X. 收藏  |  浏览/下载：29/0  |  提交时间：2013/03/25 High accuracy is required in surface testing of 90nm nodal point lithography projecting lens. By comparing various aspheric surface testing methods  the structure layout of the compensator is a meniscus positive lens combined with a Plano-convex positive lens. The design results indicate that: primary and high order aberrations are balanced well  we adopt Offner null compensator to test the aspheric surface in the point diffraction interferometer at last. In this paper  MTF exceeds diffraction limit  an Offner compensator is presented on the base of the third order aberration theory to test concave aspheric surface  root-mean-square (RMS) of wave front error /167. The F-number of the system can achieve F/1.64. By the analysis of the process of aspheric surface testing with the designed system  the optical construction parameters of which is determined by introducing equal-quantities spherical aberration to compensate all orders of aspheric coefficients. The field of view of the system is 0.02  a loosen distribution of the tolerance was presented based on the accuracy of measuring apparatus. 2009 SPIE.