机构

• 长春光学精密机械与物... [1]

采集方式

• OAI收割 [1]

内容类型

• 会议论文 [1]

发表日期

• 2006 [1]

学科主题

筛选

浏览/检索结果: 共1条，第1-1条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Study on the fabrication of blazed grating with sub-micrometer space on aluminum film (EI CONFERENCE) 会议论文  OAI收割 12th International Manufacturing Conference in China, IMCC2006, September 21, 2006 - September 23, 2006, Xi'an, China Lun S.; Hao D.; Qi X. 收藏  |  浏览/下载：14/0  |  提交时间：2013/03/25 The saw tooth grooves of blazed grating ruled by ruling engine are formed by diamond tool which presses on the aluminum film evaporated on the substrate of optical glass or metal. The real shape of ruled saw tooth groove is different from that of the ideal groove and the ruling process indicates that there are the zero order planes  similar to the flat tops  on the grating grooves. The results of Fourier analysis for the real ruled grating featuring the zero order plane structure shows that the flat top width is an important factor for grating efficiency. Additionally  bigger pressure value loaded on the diamond tool and bigger lateral pressure value on the aluminum film will be benefit to the improvement of grating diffraction efficiency. Based on the grating interferometer  the high precision positioning control system of ruling engine guarantees the accuracy of the grooves space. High density blazed grating whose space is 0.83p.m is manufactured and its' grooves spaces are very equidistant and uniform under the view field of AFM. And the infrared blazed grating  whose diffraction efficiency in the first order is up to 97 percent  is ruled successfully also.