中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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带结构样本集上的机器学习 学位论文  OAI收割
工学博士, 中国科学院自动化研究所: 中国科学院研究生院, 2011
作者:  
韩彦军
收藏  |  浏览/下载:38/0  |  提交时间:2015/09/02
In situ long trace profiler for measurement of Wolter type-I mirror (EI CONFERENCE) 会议论文  OAI收割
Advances in Metrology for X-Ray and EUV Optics III, August 1, 2010 - August 2, 2010, San Diego, CA, United states
作者:  
Chen B.;  Chen B.
收藏  |  浏览/下载:27/0  |  提交时间:2013/03/25
The surface profile of Wolter type-I mirror has a great impact on the performance of Solar X-ray Telescope. According to the existing fabrication instrument and experimental conditions in our lab  an in situ Long Trace Profiler is developed and set up on the fabrication instrument in order to measure the surface profile of Wolter mirror in real time during fabrication process. Its working mechanism  structural parameters and data processing algorithm are investigated. The prototype calibrated by a standard plane mirror is used to measure a sample of Wolter type-I mirror. The results show that our prototype can achieve an accuracy of 2.6rad rms for slope error with a stability of 1.33rad during the whole measurement period. This can meet further fabrication requirements. 2010 Copyright SPIE - The International Society for Optical Engineering.