中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
成都山地灾害与环境研... [2]
长春光学精密机械与物... [1]
采集方式
OAI收割 [3]
内容类型
会议论文 [3]
发表日期
2006 [2]
2005 [1]
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DEM based research on the landform features of China
会议论文
OAI收割
Wuhan, OCT 28-29, 2006
作者:
Tang Guoan
;
Liu, Aili
;
Li Fayuan
;
Zhou Jieyu
  |  
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2020/02/13
DEM
geomorphological parameter
landform classification
China
Application of photoresist melting method to the fabrication of holographic grating (EI CONFERENCE)
会议论文
OAI收割
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
作者:
Li W.
;
Tang Y.
;
Yu H.
;
Gao J.
收藏
  |  
浏览/下载:58/0
  |  
提交时间:2013/03/25
A new technique of reducing surface roughness of photoresist grating is presented. In this paper
photoresist melting method
which is low-cost
short-period and easy realization
is presented. In addition
the influence of photoresist melting on the groove profile of the photoresist grating is investigated. Experimental results show that the surface roughness reduces due to surface tension
when developed photoresist is heated to be melting state by this method. In experiment
when the melted photoresist grating is etched by ion beam
the surface relief grating possessing preferable groove profile is obtained on K9 glass substrate
then the surface is evaporated by aluminum using vacuum evaporation
holographic grating with preferable groove profile is successively fabricated.