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DEM based research on the landform features of China 会议论文  OAI收割
Wuhan, OCT 28-29, 2006
作者:  
Tang Guoan;  Liu, Aili;  Li Fayuan;  Zhou Jieyu
  |  收藏  |  浏览/下载:15/0  |  提交时间:2020/02/13
Application of photoresist melting method to the fabrication of holographic grating (EI CONFERENCE) 会议论文  OAI收割
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
作者:  
Li W.;  Tang Y.;  Yu H.;  Gao J.
收藏  |  浏览/下载:58/0  |  提交时间:2013/03/25
A new technique of reducing surface roughness of photoresist grating is presented. In this paper  photoresist melting method  which is low-cost  short-period and easy realization  is presented. In addition  the influence of photoresist melting on the groove profile of the photoresist grating is investigated. Experimental results show that the surface roughness reduces due to surface tension  when developed photoresist is heated to be melting state by this method. In experiment  when the melted photoresist grating is etched by ion beam  the surface relief grating possessing preferable groove profile is obtained on K9 glass substrate  then the surface is evaporated by aluminum using vacuum evaporation  holographic grating with preferable groove profile is successively fabricated.