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CAS IR Grid
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长春光学精密机械与物... [2]
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OAI收割 [2]
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会议论文 [1]
期刊论文 [1]
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2017 [1]
2005 [1]
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专题:长春光学精密机械与物理研究所
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Stable single-mode operation of 894.6 nm VCSEL at high temperatures for Cs atomic sensing
期刊论文
OAI收割
Chinese Physics B, 2017, 卷号: 26, 期号: 7
作者:
Xiang, L.
;
X. Zhang
;
J. W. Zhang
;
Y. Q. Ning
;
W. Hofmann and L. J. Wang
  |  
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2018/06/13
Application of photoresist melting method to the fabrication of holographic grating (EI CONFERENCE)
会议论文
OAI收割
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
作者:
Li W.
;
Tang Y.
;
Yu H.
;
Gao J.
;
Li W.
收藏
  |  
浏览/下载:58/0
  |  
提交时间:2013/03/25
A new technique of reducing surface roughness of photoresist grating is presented. In this paper
photoresist melting method
which is low-cost
short-period and easy realization
is presented. In addition
the influence of photoresist melting on the groove profile of the photoresist grating is investigated. Experimental results show that the surface roughness reduces due to surface tension
when developed photoresist is heated to be melting state by this method. In experiment
when the melted photoresist grating is etched by ion beam
the surface relief grating possessing preferable groove profile is obtained on K9 glass substrate
then the surface is evaporated by aluminum using vacuum evaporation
holographic grating with preferable groove profile is successively fabricated.