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CAS IR Grid
机构
近代物理研究所 [2]
长春光学精密机械与物... [1]
光电技术研究所 [1]
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OAI收割 [4]
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会议论文 [4]
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2010 [1]
2008 [1]
1998 [2]
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Determination the optical constants of hafnium oxide film by Spectroscopic ellipsometry with various dispersion models
会议论文
OAI收割
Proceedings of the SPIE - The International Society for Optical Engineering, 2010
作者:
Weidong Gao
;
Yinhua Zhang
;
Hongxiang Liu
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  |  
浏览/下载:15/0
  |  
提交时间:2016/11/25
Ion beam sputter deposition of zirconia thin films (EI CONFERENCE)
会议论文
OAI收割
International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China
作者:
收藏
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浏览/下载:11/0
  |  
提交时间:2013/03/25
We determined the optical constants (the refractive index n and the extinction coefficient k) of ion beam sputter deposited zirconia thin films with spectroscopic ellipsometry (SE). First
we obtained the structure information (the layer thickness
surface roughness and layer diffusion) by fitting the grazing x-ray reflection (GXRR) spectra. The fitted surface roughness is verified by atomic force micrometer (AFM) measurement. Second
based on the acquired structure information
the measured ellipsometry spectra are fitted in the range of 240-800nm at an incident angle of 70.25 degree. The optical constants are solved based on the Tauc-Lorentz dispersion. The optical band gap extracted by SE is 4.79eV. Finally
the optical band gap is verified by Taue plot method
which is well consistent with that of SE.
Surface modification of polyethylene terephthalate implanted by argon ions
会议论文
OAI收割
作者:
Yang, SR
;
Sun, YM
;
Zhu, ZY
;
Liu, WM
;
Li, CL
  |  
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2018/08/20
surface modification
argon ion implantation
polyethylene terephthalate
Surface modification of polyethylene terephthalate implanted by argon ions
会议论文
OAI收割
作者:
Zhu, ZY
;
Sun, YM
;
Li, CL
;
Liu, WM
;
Yang, SR
  |  
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2018/08/20
surface modification
argon ion implantation
polyethylene terephthalate