中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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  • 1991 [1]
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MECHANICAL AND TRIBOLOGICAL PROPERTIES OF SILICON-NITRIDE FILMS SYNTHESIZED BY ION-BEAM ENHANCED DEPOSITION 期刊论文  OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 卷号: 59, 页码: 1295-1299
CHEN, YR; LI, SZ; ZHANG, XS; LIU, H; YANG, GQ; QU, BC
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