中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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  • 半导体研究所 [10]
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A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging 期刊论文  OAI收割
SENSORS, 2021, 卷号: 21, 期号: 19, 页码: 6428
作者:  
Xu, Pengfei;   Si, Chaowei;   He, Yurong;   Wei, Zhenyu;   Jia, Lu;   Han, Guowei;   Ning, Jin;   Yang, Fuhua
  |  收藏  |  浏览/下载:15/0  |  提交时间:2022/05/09
A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass-Silicon Composite Wafers 期刊论文  OAI收割
MICROMACHINES, 2021, 卷号: 12, 期号: 2, 页码: 102
作者:  
He, Yurong;   Si, Chaowei;   Han, Guowei;   Zhao, Yongmei;   Ning, Jin;   Yang, Fuhua
  |  收藏  |  浏览/下载:9/0  |  提交时间:2022/11/03
Piezoelectric–Piezoresistive Coupling MEMS Sensors for Measurement of Electric Fields of Broad Bandwidth and Large Dynamic Range 期刊论文  OAI收割
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2020, 卷号: 67, 期号: 1, 页码: 551-559
作者:  
Fen Xue;   Jun Hu;   Yue Guo;   Guowei Han;   Yong Ouyang;   Shan X. Wang;   Jinliang He
  |  收藏  |  浏览/下载:13/0  |  提交时间:2021/12/20
A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer 期刊论文  OAI收割
Micromachines, 2019, 卷号: 10, 期号: 9, 页码: 589
作者:  
Jian Yang;   Meng Zhang;   Yurong He;   Yan Su ;   Guowei Han ;   Chaowei Si ;   Jin Ning;   Fuhua Yang ;   Xiaodong Wang
  |  收藏  |  浏览/下载:20/0  |  提交时间:2020/08/05
Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via 期刊论文  OAI收割
Sensors, 2019, 卷号: 19, 页码: 93
作者:  
Meng Zhang;   Jian Yang ;   Yurong He ;   Fan Yang ;   Fuhua Yang ;   Guowei Han ;   Chaowei Si;   Jin Ning
  |  收藏  |  浏览/下载:13/0  |  提交时间:2020/08/05
Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication 期刊论文  OAI收割
Micromachines, 2019, 卷号: 10, 页码: 420
作者:  
Meng Zhang;  Jian Yang;  Yurong He;  Fan Yang;  Yongmei Zhao;  Fen Xue;  Guowei Han;  Chaowei Si;  Jin Ning
  |  收藏  |  浏览/下载:17/0  |  提交时间:2020/08/05
Spectral shape of one-photon luminescence from single gold nanorods 期刊论文  OAI收割
AIP ADVANCES, 2017, 卷号: 7, 页码: 125106
作者:  
Te Wen;  Yingbo He;  Xue-Lu Liu;  Miao-Ling Lin;  Yuqing Cheng
收藏  |  浏览/下载:36/0  |  提交时间:2018/06/15
InAs homoepitaxy and InAs/AlSb/GaSb resonant interband tunneling diodes on InAs substrate 期刊论文  OAI收割
journal of crystal growth, 2016, 卷号: 443, 页码: 85-89
Wei Xiang; Guowei Wang; Hongyue Hao; Yongping Liao; Xi Han; Lichun Zhang; Yingqiang Xu; Zhengwei Ren; Haiqiao Ni; Zhenhong He; Zhichuan Niu
收藏  |  浏览/下载:34/0  |  提交时间:2017/03/16
Enhanced tunneling in the GaAs p+-n+junction by embedding InAs quantum dots 期刊论文  OAI收割
semiconductor science and technology, Semiconductor Science and Technology, 2012, 2012, 卷号: 27, 27, 期号: 11, 页码: 115010, 115010
作者:  
Wang, Lijuan;  He, Jifang;  Shang, Xiangjun;  Li, Mifeng;  Yu, Ying
  |  收藏  |  浏览/下载:20/0  |  提交时间:2013/04/19
Enhanced tunneling in the GaAs p(+)-n(+) junction by embedding InAs quantum dots 期刊论文  OAI收割
semiconductor science and technology, SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2012, 2012, 卷号: 27, 27, 期号: 11, 页码: 115010, 115010
作者:  
Wang LJ (Wang, Lijuan);  He JF (He, Jifang);  Shang XJ (Shang, Xiangjun)
  |  收藏  |  浏览/下载:29/0  |  提交时间:2013/03/26