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  • 上海光学精密机械研究... [4]
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A novel method for measuring the coma of a lithographic projection system by use of mirror-symmetry marks 期刊论文  OAI收割
opt. laser technol., 2007, 卷号: 39, 期号: 5, 页码: 922, 925
Zhang Dongqing; 王向朝; Shi Weijie; Wang Fan
收藏  |  浏览/下载:1497/502  |  提交时间:2009/09/18
A novel method to determine the FOCAL energy range 期刊论文  OAI收割
chin. opt. lett., 2005, 卷号: 3, 期号: 10, 页码: 589, 592
Dongqing Zhang; 王向朝; Weijie Shi
收藏  |  浏览/下载:1297/250  |  提交时间:2009/09/18
Flexible Pupil Correction Technology for Photolithography Machine 期刊论文  OAI收割
SIXTH INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONIC ENGINEERING (ICOPEN 2018), 卷号: 10827
作者:  
Zhu Siyu;  Niu Zhiyuan;  Zhang Fang;  Ma Xiaozhe;  Zeng Zongshun
  |  收藏  |  浏览/下载:13/0  |  提交时间:2018/12/25
An Excellent Performance Optical System for Freeform Pupil Illumination Module in Immersion Photolithography Machine 期刊论文  OAI收割
SIXTH INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONIC ENGINEERING (ICOPEN 2018), 卷号: 10827
作者:  
Zeng Zongshun;  Niu Zhiyuan;  Zhang Fang;  Ma Xiaozhe;  Zhu Siyu
  |  收藏  |  浏览/下载:12/0  |  提交时间:2018/12/25