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Force prediction model considering material removal mechanism for axial ultrasonic vibration-assisted peripheral grinding of Zerodur 期刊论文  OAI收割
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2018, 卷号: 98, 期号: 43355, 页码: 2775-2789
作者:  
Sun, Guoyan;  Zhao, Lingling;  Ma, Zhen;  Zhao, Qingliang
  |  收藏  |  浏览/下载:63/0  |  提交时间:2018/10/23
Assessment of surface roughness by use of soft x-ray scattering (EI CONFERENCE) 会议论文  OAI收割
Soft X-Ray Lasers and Applications VIII, August 4, 2009 - August 6, 2009, San Diego, CA, United states
Yan-li M.; Yong-gang W.; Shu-yan C.; Bo C.
收藏  |  浏览/下载:16/0  |  提交时间:2013/03/25
A soft x-ray reflectometer with laser produced plasma source has been designed  which can work from wavelength 8nm to 30 nm and has high performance. Using the soft x-ray reflectometer above  the scattering light distribution of silicon and zerodur mirrors which have super-smooth surfaces could be measured at different incidence angle and different wavelength. The measurement when the incidence angle is 2 degree and the wavelength is 1 lnm has been given in this paper. A surface scattering theory of soft x-ray grazing incidence optics based on linear system theory and an inverse scattering mathematical model is introduced. The vector scattering theory of soft x-ray scattering also is stated in detail. The scattering data are analyzed by both the methods above respectively to give information about the surface profiles. On the other hand  both the two samples are measured by WYKO surface profiler  and the surface roughness of the silicon and zerodur mirror is 1.3 nm and 1.5nm respectively. The calculated results are in quantitative agreement with those measured by WYKO surface profiler  which indicates that soft x-ray scattering is a very useful tool for the evaluation of highly polished surfaces. But there still some difference among the results of different theory and WYKO  and the possible reasons of such difference have been discussed in detail. 2009 SPIE.  
用于多普勒测风雷达的单频全固态激光器稳频 期刊论文  OAI收割
Chin. Opt. Lett., 2008, 卷号: 6, 期号: 9, 页码: 679, 680
孙旭涛; 刘继桥; 周军; 陈卫标
收藏  |  浏览/下载:1404/156  |  提交时间:2009/09/18