机构

• 长春光学精密机械与物... [1]

采集方式

• OAI收割 [1]

内容类型

• 会议论文 [1]

发表日期

• 2009 [1]

学科主题

筛选

浏览/检索结果: 共1条，第1-1条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择提交时间升序提交时间降序发表日期升序发表日期降序题名升序题名降序作者升序作者降序 Double-swing method used for polishing off-axis aspherical mirrors (EI CONFERENCE) 会议论文  OAI收割 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China 作者:  Chen Y.;  Song S.-M.;  Xuan B.;  Wang P.;  Li J.-F. 收藏  |  浏览/下载：23/0  |  提交时间：2013/03/25 Based on the characteristics of off-axis aspherical surface  the comparison of simulation effects under different parameters is made. In order to achieve optimal parameters  a new method used for polishing off-axis aspherical mirrors-Double-Swing Method (DSM) is proposed in this paper  a high order off-axis rectangle aspherical mirror has been polished by DSM. The final result of profile measurements of 12nm  and the polishing mechanism of DSM is introduced. The mathematical model of the DSM with steady movement state is established.The movement of this mathematical model is simulated in a programming language  RMS is achieved. The result indicates that the method is of practice and has even higher working efficiency and precision. 2009 SPIE.