A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements
文献类型：期刊论文
| 作者 | Tao, Xian ; Zhang, Zhengtao; Zhang, Feng; Xu, De
|
| 刊名 | IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
 |
| 出版日期 | 2015-09-01 |
| 卷号 | 64期号:9页码:2530-2540 |
| 关键词 | Bright-field imaging system (BFIS) dark-field imaging system (DFIS) flaw inspection image processing large-aperture optical element measurement path planning |
| 英文摘要 | Surface defects on precision optical elements must be carefully inspected since they impact the normal operation of an optical system. It is a challenge to inspect defects of large-aperture optical elements using an imaging system because of efficiency and accuracy. This paper designs a novel and effective inspection instrument with two imaging systems for large-aperture optical elements. They are the dark-field imaging system (DFIS) with a line scan camera in 10-gm resolution and the bright-field (BF) imaging system with a microscopic camera in a 0.85-gm resolution. To keep the clarity of the DFIS in largescope quickly scanning, an adaptive scan path planning method is proposed. A set of novel algorithms is proposed to process a large number of dark-field images. Due to the limitations of the DFIS in scattering effect, the corresponding BF images are obtained according to the dark-field images. The classification of flaws and their sizes measurement based on BF images are also presented. The experiments show that the instrument can scan an optical element with the size of 810 mm x 460 mm in less than 6 min and the inspection precision can reach 3 mu m. |
| WOS标题词 | Science & Technology ; Technology |
| 类目[WOS] | Engineering, Electrical & Electronic ; Instruments & Instrumentation |
| 研究领域[WOS] | Engineering ; Instruments & Instrumentation |
| 关键词[WOS] | VISUAL INSPECTION ; DEFECTS |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000359554900020 |
| 源URL | [http://ir.ia.ac.cn/handle/173211/8901]  |
| 专题 | 精密感知与控制研究中心_精密感知与控制 |
| 作者单位 | Chinese Acad Sci, Res Ctr Precis Sensing & Control, Inst Automat, Beijing 100190, Peoples R China |
| 推荐引用方式 GB/T 7714 | Tao, Xian,Zhang, Zhengtao,Zhang, Feng,et al. A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements[J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,2015,64(9):2530-2540. |
| APA | Tao, Xian,Zhang, Zhengtao,Zhang, Feng,&Xu, De.(2015).A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements.IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,64(9),2530-2540. |
| MLA | Tao, Xian,et al."A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements".IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT 64.9(2015):2530-2540. |
入库方式： OAI收割
来源：自动化研究所
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