Research on the Factory Automation Software Based on the SEMI Standard
文献类型：会议论文
| 作者 | Wang CX(王晨曦) ; Liu MZ(刘明哲); Xu AD(徐皑冬); Jin N(金妮)
|
| 出版日期 | 2015 |
| 会议名称 | 2015 3rd International Conference on Material, Mechanical and Manufacturing Engineering (IC3ME 2015) |
| 会议日期 | June 27-28, 2015 |
| 会议地点 | Guangzhou, China |
| 关键词 | IC equipment SEMI FA |
| 页码 | 662-665 |
| 中文摘要 | Factory automation (FA) system software is a bridge to realize information exchange between processing equipment of semiconductor equipment and factory host. It receives the control instruction sent by a host, and sends the control instruction to the manufacturing equipment after internal analysis and processing. At the same time, FA receives the real time data and the various process parameters sent by equipment, processes the data, and sends the data to the host. In this paper, analysis of the process of semiconductor processing equipment, according to the actual needs of the semiconductor processing equipment, research on FA Software based on the SEMI standard. |
| 收录类别 | CPCI（ISTP） |
| 产权排序 | 1 |
| 会议录 | PROCEEDINGS OF THE 3RD INTERNATIONAL CONFERENCE ON MATERIAL, MECHANICAL AND MANUFACTURING ENGINEERING
 |
| 会议录出版者 | Atlantis Press |
| 会议录出版地 | Paris |
| 语种 | 英语 |
| ISBN号 | 978-94-6252-100-1 |
| WOS记录号 | WOS:000367097600129 |
| 源URL | [http://ir.sia.cn/handle/173321/17406]  |
| 专题 | 沈阳自动化研究所_工业控制网络与系统研究室 |
| 推荐引用方式 GB/T 7714 | Wang CX,Liu MZ,Xu AD,et al. Research on the Factory Automation Software Based on the SEMI Standard[C]. 见:2015 3rd International Conference on Material, Mechanical and Manufacturing Engineering (IC3ME 2015). Guangzhou, China. June 27-28, 2015. |
入库方式： OAI收割
来源：沈阳自动化研究所
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