METHOD FOR REALIZING IC EQUIPMENT CONTROL SOFTWARE-ORIENTED GUI PLATFORMIZATION
文献类型：专利
| 作者 | Yu HB(于海斌) ; Xu AD(徐皑冬); Liu MZ(刘明哲); Li Z(李正); Wang K(王锴); Jin N(金妮); Zhang JL(张吉龙)
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| 发表日期 | 2013-08-22 |
| 专利国别 | 美国 |
| 专利号 | US2013219306A1 |
| 专利类型 | 发明 |
| 产权排序 | 1 |
| 权利人 | 中国科学院沈阳自动化研究所 |
| 其他题名 | 面向IC装备控制软件的GUI平台化实现方法 |
| 中文摘要 | The present invention relates to a method for realizing IC (integrate circuit) equipment control software-oriented GUI (graphical user interface) platformization, comprising the following steps: developing a corresponding IC equipment drive module in accordance with the characteristics of different manufacturers' IC equipment and drawing a GUI platform; connecting the monitoring host of the IC equipment to a controller through the IC equipment drive module, thereby forming a communication network; the IC equipment drive module reads data in the controller through the connection network and maps the data to the general data layer of the GUI platform; the GUI platform performs real-time display, control, and exception handling on the data through the general data layer, thus realizing GUI platformization of the IC equipment control software. The present invention realizes a cross-platform mechanism, improves the cluster monitoring ability of the wafer manufacturing equipment, is able to meet the user's demands for flexible configuration of the human-machine interface of the corresponding control system such that the whole production process can be quickly configured in a very short time, and meets the needs of advanced startup of the production. |
| 是否PCT专利 | 是 |
| 申请日期 | 2010-11-29 |
| 语种 | 英语 |
| 专利申请号 | US201013879248 |
| 源URL | [http://ir.sia.cn/handle/173321/17282]  |
| 专题 | 沈阳自动化研究所_工业控制网络与系统研究室 |
| 推荐引用方式 GB/T 7714 | Yu HB,Xu AD,Liu MZ,et al. METHOD FOR REALIZING IC EQUIPMENT CONTROL SOFTWARE-ORIENTED GUI PLATFORMIZATION. US2013219306A1. 2013-08-22. |
入库方式： OAI收割
来源：沈阳自动化研究所
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