MEMS-fabricated ICPE grippers for aqueous applications
文献类型：会议论文
| 作者 | Zhou, J.W.L.; Li WJ(李文荣)
|
| 出版日期 | 2003 |
| 会议名称 | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers |
| 会议日期 | June 8-12, 2003 |
| 会议地点 | Boston, MA, United states |
| 页码 | 556-559 |
| 中文摘要 | This paper presents the results of our ongoing investigation of using Nafion solution to construct micron scale actuators as grippers for underwater manipulation. We have demonstrated MEMS-based fabrication of cantilever structures composed of Au/Nafion/Au film layers on silicon substrates is possible. The smallest actuators fabricated were 30μm wide, 300μm long and 0.4μm thick. We have shown that 2-finger actuators (each 100μm wide, 1200μm long and 0.4μm thick) could be fully actuated in water at ∼7V DC. In addition, we have found that micro Au/Nafion/Au cantilevers can respond to pH level changes in a solution environment, suggesting that they could potentially be used as biological sensors. |
| 收录类别 | EI |
| 产权排序 | 2 |
| 会议主办者 | IEEE Electron Devices Society (EDS) |
| 会议录 | TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
 |
| 会议录出版者 | IEEE |
| 语种 | 英语 |
| ISBN号 | 978-0-7803-7731-8 |
| 源URL | [http://ir.sia.cn/handle/173321/17199]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Zhou, J.W.L.,Li WJ. MEMS-fabricated ICPE grippers for aqueous applications[C]. 见:12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers. Boston, MA, United states. June 8-12, 2003. |
入库方式： OAI收割
来源：沈阳自动化研究所
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