Study on a method of dispensing calibration for photoresist pump based on support vector machine
文献类型：会议论文
| 作者 | Zhang JL(张吉龙) ; Hu JT(胡静涛); Cao YX(曹云侠); Chi HD(迟浩东)
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| 出版日期 | 2015 |
| 会议名称 | 2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER) |
| 会议日期 | June 8-12, 2015 |
| 会议地点 | Shenyang, China |
| 关键词 | coater and developer photoresist pump support vector machine calibrate |
| 页码 | 1552-1556 |
| 中文摘要 | Photoresist pump is an important part of coater and developer equipment. High precision control for the amount of photoresist is of great significance to improve the quality of coating and reduce the cost of production. Its working principle is dispensing and reloading photoresist by the positive and negative rotation of its internal stepping motor, and the dispensing amount is determined by the pulse count that the pump controller sends. But due to the linearity error of the pump, viscosity of photoresist, damping of the pipeline, pressure of the outlet and factors such as environmental temperature and humidity, there is a deviation between the dispensing actual value and set value, so calibration is needed. For the above question, firstly, in this paper the support vector machine model of the actual dispensing amount is established by dispensing speed and set value as its input vector construction. Secondly, the dispensing revised value is solved by iterative method, and then the calibration coefficients are calculated. Finally, the validity of this method is verified by experimental results, moreover, the dispensing precision is improved and the time which determining calibration coefficients required is reduced by this method. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 1 |
| 会议录 | 2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER)
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| 会议录出版者 | IEEE |
| 会议录出版地 | Piscataway, NJ, USA |
| 语种 | 英语 |
| ISSN号 | 2379-7711 |
| ISBN号 | 978-1-4799-8730-6 |
| WOS记录号 | WOS:000380502300283 |
| 源URL | [http://ir.sia.cn/handle/173321/17521]  |
| 专题 | 沈阳自动化研究所_空间自动化技术研究室 |
| 推荐引用方式 GB/T 7714 | Zhang JL,Hu JT,Cao YX,et al. Study on a method of dispensing calibration for photoresist pump based on support vector machine[C]. 见:2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER). Shenyang, China. June 8-12, 2015. |
入库方式： OAI收割
来源：沈阳自动化研究所
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