Scheduling method for single-arm multi-cluster tools with residency time constraints
文献类型：会议论文
| 作者 | Hu JT(胡静涛) ; Li, Linying
|
| 出版日期 | 2015 |
| 会议名称 | 2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER) |
| 会议日期 | June 8-12, 2015 |
| 会议地点 | Shenyang, China |
| 关键词 | semiconductor manufacutory multiple-cluster tools residency time cosntraints buffer/process mudules single-arm robot scheduling analysis |
| 页码 | 1574-1578 |
| 中文摘要 | In semiconductor manufacturing, the throughout analysis and robot action sequence are crucial for multi-cluster tools scheduling problems. This paper studies a general robot scheduling problem for multi-cluster tools with the single-arm robot and buffer process modules. Firstly, the scheduling model with constraints of processing module and robots transport is addressed. Secondly, the lower bound of cycle time is theoretically proved. And based on decomposition idea, the heuristic scheduling method, which produces robot action sequence by virtue of random processing time and cycle time, is proposed. Finally, the superiority of the proposed method is proved simulation results. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 1 |
| 会议录 | 2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER)
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | Piscataway, NJ, USA |
| 语种 | 英语 |
| ISSN号 | 2379-7711 |
| ISBN号 | 978-1-4799-8730-6 |
| WOS记录号 | WOS:000380502300287 |
| 源URL | [http://ir.sia.cn/handle/173321/17670]  |
| 专题 | 沈阳自动化研究所_信息服务与智能控制技术研究室 |
| 推荐引用方式 GB/T 7714 | Hu JT,Li, Linying. Scheduling method for single-arm multi-cluster tools with residency time constraints[C]. 见:2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER). Shenyang, China. June 8-12, 2015. |
入库方式： OAI收割
来源：沈阳自动化研究所
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