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基于激光光散射层貌术的蓝宝石内部缺陷检测系统

文献类型：期刊论文

作者刘洋; 徐文东; 赵成强; 胡永璐; 刘涛; 王闯
刊名中国激光
出版日期2014
卷号41期号:9页码:902007
关键词激光光学 机器视觉 缺陷检测 散射 图像分析
其他题名A Detecting System of Sapphire Internal Defects Based on Laser Light ScatteringTomography
通讯作者刘洋, 中国科学院上海光学精密机械研究所, 上海 201800, 中国. ; 徐文东, 中国科学院上海光学精密机械研究所, 上海 201800, 中国. ; 赵成强, 中国科学院上海光学精密机械研究所, 上海 201800, 中国. ; 胡永璐, 中国科学院上海光学精密机械研究所, 上海 201800, 中国. ; 刘涛, 中国科学院上海光学精密机械研究所, 上海 201800, 中国. ; 王闯, 国家纳米科学中心, 北京 100190, 中国.
中文摘要蓝宝石是制作发光二极管(LED)衬底的基本材料,其质量管理中心_期刊论文直接影响高亮度LED衬底的晶片制造成品率,对于棒状蓝宝石晶体内部缺陷的检测定位能极大地降低生产成本,提高成品率。针对蓝宝石衬底加工要求,在机器视觉技术的基础上,利用LabVIEW 及NI公司的图像采集卡和数据采集卡搭建了一个基于激光光散射层貌术的蓝宝石内部缺陷检测定位系统。系统利用高强度的线状激光照射下缺陷产生的光散射效应对蓝宝石晶体进行逐层扫描和图像采集,运用图像增强、图像分割及图像提取等图像处理手段对采集到的图像进行缺陷提取和分析,实现了对蓝宝石内部缺陷的检测和定位,具有很高的实时性和可视化效果。实验结果表明,该系统能有效地识别出蓝宝石晶体中的散射颗粒缺陷,并对其在棒状蓝宝石晶体深度方向上准确定位。
英文摘要As the basic material of light emitting diode(LED)substrate, the quality of sapphire directly affects the production yield of high-brightness LED substrate chips.The detection and positioning of internal defects in sapphire crystal bar can greatly reduce the production cost and improve the yield.Based on machine vision technique, an internal defect detection and positioning system are built for sapphire on the basis of laser light scattering tomography taking the processing requirements on sapphire substrate into consideration.LabVIEW and image acquisition card and data acquisition card from NI Company are adopted in this system.The detection and positioning of internal defects in sapphire crystal is realized by scanning the sapphire crystal layer by layer through the light scattering effect generated by the irradiation of high-intensity linear laser on defects.A lot of image processing methods such as image enhancement, image segmentation and image extraction are adopted to extract and analyze the defects, enhancing the real-time performance and visuality of this system.The experimental results show that this system can identify the scattering particle defects in sapphire crystal effectively, and position them in depth direction accurately.
收录类别EI
语种中文
版本出版稿
源URL[http://ir.siom.ac.cn/handle/181231/12903]  
专题上海光学精密机械研究所_高密度光存储技术实验室
作者单位1.Liu Yang, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
2.Xu Wendong, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
3.Zhao Chengqiang, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
4.Hu Yonglu, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
5.Liu Tao, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
6.Wang Chuang, National Center for Nanoscience and Technology, Beijing 100190, China.
推荐引用方式
GB/T 7714		 刘洋,徐文东,赵成强,等. 基于激光光散射层貌术的蓝宝石内部缺陷检测系统[J]. 中国激光,2014,41(9):902007.
APA 刘洋,徐文东,赵成强,胡永璐,刘涛,&王闯.(2014).基于激光光散射层貌术的蓝宝石内部缺陷检测系统.中国激光,41(9),902007.
MLA 刘洋,et al."基于激光光散射层貌术的蓝宝石内部缺陷检测系统".中国激光 41.9(2014):902007.

入库方式： OAI收割

来源：上海光学精密机械研究所

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