Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials
文献类型：期刊论文
| 作者 | Liu N(刘娜) ; Wang FF(王飞飞); Liu LQ(刘连庆); Yu HB(于海波); Xie, Shaorong; Wang, Jun; Wang YC(王越超); Lee, Gwo-Bin; Li WJ(李文荣)
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| 刊名 | SCIENTIFIC REPORTS
 |
| 出版日期 | 2016 |
| 卷号 | 6页码:1-10 |
| ISSN号 | 2045-2322 |
| 产权排序 | 1 |
| 通讯作者 | 刘连庆 ; 李文荣 |
| 中文摘要 | The synthesis and assembly of components are key steps in micro/nano device manufacturing. In this article, we report an optically controlled assembly method that can rapidly pattern micro/nano devices by directly assembling ions and nanomaterials without expensive physical masks and complex etching processes. Utilizing this controllable process, different types of device components (e.g., metallic and semiconductor) can be fabricated and assembled in 10-30 seconds, which is far more rapid and cost-effective than any other micro/nano fabrication method. |
| WOS标题词 | Science & Technology |
| 类目[WOS] | Multidisciplinary Sciences |
| 研究领域[WOS] | Science & Technology - Other Topics |
| 关键词[WOS] | ZINC-OXIDE ; LITHOGRAPHY ; FABRICATION ; TRANSISTORS ; FILM ; DIELECTROPHORESIS ; ELECTRODEPOSITION ; MICROSTRUCTURES ; MICROPARTICLES ; MANIPULATION |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000381978200001 |
| 源URL | [http://ir.sia.cn/handle/173321/19182]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Liu N,Wang FF,Liu LQ,et al. Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials[J]. SCIENTIFIC REPORTS,2016,6:1-10. |
| APA | Liu N.,Wang FF.,Liu LQ.,Yu HB.,Xie, Shaorong.,...&Li WJ.(2016).Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials.SCIENTIFIC REPORTS,6,1-10. |
| MLA | Liu N,et al."Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials".SCIENTIFIC REPORTS 6(2016):1-10. |
入库方式： OAI收割
来源：沈阳自动化研究所
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