Development of an automated microinjection system for rapid fabrication of carbon nanotube sensors
文献类型：会议论文
| 作者 | Qu, Selina C.; Fung, Carmen K.M.; Chan, Rosa H.M.; Li WJ(李文荣)
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| 出版日期 | 2004 |
| 会议名称 | International Conference on Intelligent Mechatronics and Automation |
| 会议日期 | August 26-31, 2004 |
| 会议地点 | Chengdu, China |
| 关键词 | AC electrophoretic manipulation carbon nanotube CNT sensors nano manufacturing nano batch fabrication |
| 页码 | 588-593 |
| 通讯作者 | 李文荣 |
| 中文摘要 | A novel automated Carbon Nanotube (CNT) microinjection system for batch fabrication of a bulk multi-walled carbon nanotubes (MWNT) based MEMS sensor is under development and described in this paper. The system will eventually combine a micro-robotic station for microinjection with AC electrophoretic manipulation of nano-wire bundles to produce nano-wire sensors with much more efficiency in cost and time than currently available fabrication methods. We have already proved that CNTs can be repeatably manipulated between micro-fabricated electrodes using dielectrophoretic manipulation, and demonstrated devices which can serve as novel thermal sensors with low power consumption (∼ μW) and fast frequency response (∼ 100kHz). Our current focus is the develop a feasible batch manufacturable method for functional CNT sensors using an automated microinjection system. The technique of dielectrophoretic manipulation and the design of the microinjection system are presented in this paper. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 3 |
| 会议主办者 | Hong Kong Univ Sci & Technol, Kagawa Univ, Univ Electro Commun, Natl Nat Sci Fdn China, Shanghai Univ, Harbin Engn Univ, Japan Soc Precis Engn, IEEE Robot & Automat Soc, IEEE Syst, Man & Cybernet Soc, IEEE Shikoku Sect, Chinese Inst Elect, Chinese Soc Mech Engn, China Cleaning Engn Technol Cooperat Assoc, Robot Soc Japan, Int Mechatron Forum, JSPE, Tech Comm Intell Mechatron, Minist Educ, China |
| 会议录 | PROCEEDINGS OF THE 2004 INTERNATIONAL CONFERENCE ON INTELLIGENT MECHATRONICS AND AUTOMATION
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | NEW YORK |
| 语种 | 英语 |
| ISBN号 | 0-7803-8748-1 |
| WOS记录号 | WOS:000225452400113 |
| 源URL | [http://ir.sia.cn/handle/173321/20004]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Qu, Selina C.,Fung, Carmen K.M.,Chan, Rosa H.M.,et al. Development of an automated microinjection system for rapid fabrication of carbon nanotube sensors[C]. 见:International Conference on Intelligent Mechatronics and Automation. Chengdu, China. August 26-31, 2004. |
入库方式： OAI收割
来源：沈阳自动化研究所
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