Towards batch fabrication of carbon nanotube sensors by combining microinjection and dielectrophoretic manipulation
文献类型：会议论文
| 作者 | Lai, King W. C.; Fung, Carmen K. M.; Qu, Selina C.; Lei, K.F.; Li WJ(李文荣)
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| 出版日期 | 2004 |
| 会议名称 | IEEE International Conference on Robotics and Biomimetics (ROBIO 2004) |
| 会议日期 | August 22-26, 2004 |
| 会议地点 | Shenyang, China |
| 关键词 | AC electrophoretic manipulation carbon nanotube CNT sensors microinjection nano batch fabrication |
| 页码 | 634-639 |
| 通讯作者 | 李文荣 |
| 中文摘要 | We present the preliminary design and test results of a novel automated Carbon Nanotube (CNT) microinjection system for batch fabrication of a bulk multi-walled carbon nanotubes (MWNT) based sensors. This project will eventually develop an automated system to rapidly and precisely execute the AC electrophoretic manipulation of MWNT bundles on substrates that are used to fabricate nano-sensors. We have already shown that, using dielectrophoretic manipulation, CNTs were successfully and repeatably manipulated between micro-fabricated electrodes. The CNT devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (∼μW) and electronic circuit response of about 100 kHz in constant current mode operation. Besides, preliminary microinjection experiments were conducted which demonstrated the possibility of the automated microinjection of solution with spot size of ∼200μm. Based on these experimental evidences, a feasible batch fabrication method for functional CNT sensors by using an automated injection system is under development. The system will ultimately reduce fabrication accuracy and time of nano sensing devices and potentially enable fully automated assembly of CNT and other nano-wire based devices. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 2 |
| 会议主办者 | IEEE Robot & Automat Soc, IEEE HK RA CS Joint Chapter, Chinese Acad Sci, Shenyang Inst Automat, Chinese High tech Dev Program, Robot Soc Japan, Japan Soc Mech Engineers, Int Rescue Syst Inst, Shenyang Hunnan New Urban Area, Shenyang New & High tech Ind Dev Zone |
| 会议录 | IEEE ROBIO 2004: Proceedings of the IEEE International Conference on Robotics and Biomimetics
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | NEW YORK |
| 语种 | 英语 |
| ISBN号 | 0-7803-8641-8 |
| WOS记录号 | WOS:000234343000113 |
| 源URL | [http://ir.sia.cn/handle/173321/20008]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Lai, King W. C.,Fung, Carmen K. M.,Qu, Selina C.,et al. Towards batch fabrication of carbon nanotube sensors by combining microinjection and dielectrophoretic manipulation[C]. 见:IEEE International Conference on Robotics and Biomimetics (ROBIO 2004). Shenyang, China. August 22-26, 2004. |
入库方式： OAI收割
来源：沈阳自动化研究所
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