Displacement measurement of a thermally actuated polymer micro robotic gripper using the optical focus method
文献类型：会议论文
| 作者 | Mou L(缪磊) ; Dong ZL(董再励); Chan, Hoyin
|
| 出版日期 | 2004 |
| 会议名称 | 5th World Congress on Intelligent Control and Automation |
| 会议日期 | June 15-19, 2004 |
| 会议地点 | Hangzhou, China |
| 页码 | 3800-3804 |
| 中文摘要 | With the maturing design of micro electrical mechanism systems, the metrology for MEMS is becoming the hot research in the micro system technology. In this paper, we used the sum-modified-Laplacian (SML) focus measure and depth estimation method to measure the tip deflection of a thermally actuated polymer micro robotic actuator. Twenty-three under-water images of the micro actuator working at the temperature of 42°C have been used to illustrate the idea of measuring the tip deflection using optical focusing method. The results showed in the paper can be used to metrology MEMS. By optical focus method, we can measure the tip defection, which can act as a feedback input to the actuator. So, an accurate control of the motion of actuator can be achieved. |
| 收录类别 | EI |
| 产权排序 | 1 |
| 会议主办者 | Zhejiang University; National Laboratory of Industrial Control Technology; Zhejiang University of Technology |
| 会议录 | Proceedings of the World Congress on Intelligent Control and Automation (WCICA)
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | NEW YORK |
| 语种 | 英语 |
| 源URL | [http://ir.sia.cn/handle/173321/20011]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Mou L,Dong ZL,Chan, Hoyin. Displacement measurement of a thermally actuated polymer micro robotic gripper using the optical focus method[C]. 见:5th World Congress on Intelligent Control and Automation. Hangzhou, China. June 15-19, 2004. |
入库方式： OAI收割
来源：沈阳自动化研究所
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