Rapid fabrication of CNT sensors using electro-chemical deposition of functionalized CNTs
文献类型：会议论文
| 作者 | Chow, Winnie W. Y.; Wong, Man Keung; Li WJ(李文荣) ; Wong, Ka Wai
|
| 出版日期 | 2007 |
| 会议名称 | 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 |
| 会议日期 | January 16, 2007 - January 19, 2007 |
| 会议地点 | Bangkok, Thailand |
| 关键词 | carbon nanotubes electro-chemical deposition |
| 页码 | 507-510 |
| 通讯作者 | 李文荣 |
| 中文摘要 | We present a novel fabrication technique to fabricate functionalized CNT sensors rapidly using electro-chemical deposition method. The basic fabrication process of this sensor includes fabrication of a gold (Au) microelectrode array by photolithography process, functionalization of multi-walled carbon nanotubes (MWNTs) with carboxylic acid groups (-COOH), and electro-chemical deposition of functionalized MWNTs (f-CNTs) on the Au microelectrode array. The adhesion between the f-CNTs and the Au microelectrodes could be enhanced if CNT sensors are built using the process described in this paper. The I-V characteristics of the sensors were investigated. Our experimental results show that CNT sensors fabricated by electro-chemical process have dramatically different I-V characteristics compared with sensors fabricated by DEP or AFM manipulation techniques. The power limit of the sensors ranges from 0.28mW to 6.21mW, which is much higher than most reported CNT sensors. Self-heating effect can be induced at input power of ∼2.2mW. Based on these experimental results, we think that the novel f-CNT sensors should be investigated further for applications in thermal, mechanical, and biomedical systems. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 3 |
| 会议录 | Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
 |
| 会议录出版者 | IEEE Computer Society |
| 会议录出版地 | Piscataway, NJ, USA |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-0610-4 |
| WOS记录号 | WOS:000248619100048 |
| 源URL | [http://ir.sia.cn/handle/173321/20021]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Chow, Winnie W. Y.,Wong, Man Keung,Li WJ,et al. Rapid fabrication of CNT sensors using electro-chemical deposition of functionalized CNTs[C]. 见:2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. Bangkok, Thailand. January 16, 2007 - January 19, 2007. |
入库方式： OAI收割
来源：沈阳自动化研究所
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