Design, fabrication and analysis of microrobotic insect wings and thorax with different materials by MEMS technology
文献类型:会议论文
作者 | Chi PC(迟鹏程); Zhang WP(张卫平); Chen WY(陈文元); Li HY(李洪谊)![]() |
出版日期 | 2011 |
会议名称 | 2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011 |
会议日期 | July 29-31, 2011 |
会议地点 | Sanya, China |
关键词 | Mechanical Microrobot MEMS technology |
页码 | 3135-3138 |
通讯作者 | 张卫平 |
中文摘要 | This paper presents a feasibility step in the development of biomimetic microrobotic insects. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. A flapping-wing flying MEMS concept and design inspired from insects is first described. Then different kinds of materials used feasibly for flapping-wing microrobotic insect by MEMS technology, such as SU-8, Titanium alloy and Parylene-C, are discussed. And artificial insect wings and thoraxs with different materials by MEMS Technology are fabricated and analyzed. Finally, summarize the paper and propose future research priorities. |
收录类别 | EI ; CPCI(ISTP) |
产权排序 | 2 |
会议录 | Advanced Materials Research
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会议录出版者 | Trans Tech Publications Ltd |
会议录出版地 | Clausthal-Zellerfeld, Germany |
语种 | 英语 |
ISSN号 | 1022-6680 |
ISBN号 | 978-3-03785-193-7 |
WOS记录号 | WOS:000302382701274 |
源URL | [http://ir.sia.cn/handle/173321/20064] ![]() |
专题 | 沈阳自动化研究所_机器人学研究室 |
推荐引用方式 GB/T 7714 | Chi PC,Zhang WP,Chen WY,et al. Design, fabrication and analysis of microrobotic insect wings and thorax with different materials by MEMS technology[C]. 见:2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011. Sanya, China. July 29-31, 2011. |
入库方式: OAI收割
来源:沈阳自动化研究所
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