Phase shifting-based debris effect detection in USV-assisted AFM nanomachining
文献类型：期刊论文
| 作者 | Shi JL(施佳林) ; Liu LQ(刘连庆); Yu P(于鹏); Cong Y(丛杨); Li GY(李广勇)
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| 刊名 | Applied Surface Science
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| 出版日期 | 2017 |
| 卷号 | 413页码:317-326 |
| 关键词 | Atomic force microscopy (AFM) Nanomachining Ultrasonic vibration Thin-film |
| ISSN号 | 0169-4332 |
| 产权排序 | 1 |
| 通讯作者 | 刘连庆 |
| 中文摘要 | Atomic force microscopy (AFM) mechanical-based lithography attracts much attention in nanomanufacturing due to its advantages of low cost, high precision and high resolution. However, debris effects during mechanical lithography often lead to an unstable machining process and inaccurate results, which limits further applications of AFM-based lithography. There is a lack of a real-time debris detection approach, which is the prerequisite to eventually eliminating the influence of the debris, and of a method that can solve the above problems well. The ultrasonic vibration (USV)-assisted AFM has the ability to sense the machining depth in real time by detecting the phase shifting of cantilever. However, whether the pile-up of debris affect the phase response of cantilever is still lack of investigation. Therefore, we analyzed the mechanism of the debris effect on force control mode and investigated the relationship between phase shifting and pile-up of debris. Theoretical analysis and experimental results reveal that the pile-up of debris have negligible effect on phase shifting of cantilever. Therefore, the phase shifting-based method can detect the debris effect on machining depth in force control mode of AFM machining. |
| 收录类别 | EI |
| 语种 | 英语 |
| 源URL | [http://ir.sia.cn/handle/173321/20370]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Shi JL,Liu LQ,Yu P,et al. Phase shifting-based debris effect detection in USV-assisted AFM nanomachining[J]. Applied Surface Science,2017,413:317-326. |
| APA | Shi JL,Liu LQ,Yu P,Cong Y,&Li GY.(2017).Phase shifting-based debris effect detection in USV-assisted AFM nanomachining.Applied Surface Science,413,317-326. |
| MLA | Shi JL,et al."Phase shifting-based debris effect detection in USV-assisted AFM nanomachining".Applied Surface Science 413(2017):317-326. |
入库方式： OAI收割
来源：沈阳自动化研究所
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