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Phase mode nanomachining on ultra-thin films with atomic force microscopy

文献类型：期刊论文

作者Liu LQ(刘连庆); Shi JL(施佳林); Yu P(于鹏); Li GY(李广勇)
刊名Materials Letters
出版日期2017
卷号209页码:437-440
关键词Atomic force microscopy Thin films Wear and tribology
ISSN号0167-577X
产权排序1
通讯作者Liu LQ(刘连庆)
中文摘要Machining or patterning ultra-thin films with specified structures are critical challenges. In this work, a novel mode of atomic force microscopy nanomachining is proposed. The phase response of the cantilever is used as the input of feedback control to modulate the machining force to achieve the desired machined depth. The proposed phase mode, overcoming the disadvantages of force mode, is not affected by the debris piled-up and has the ability to sense the interface of an ultra-thin film and predict the machining depth without post-imaging. The effectiveness of the phase mode has been proven by experiments.
WOS标题词Science & Technology ; Technology ; Physical Sciences
类目[WOS]Materials Science, Multidisciplinary ; Physics, Applied
研究领域[WOS]Materials Science ; Physics
关键词[WOS]DAMAGE
收录类别SCI ; EI
语种英语
WOS记录号WOS:000413124300112
源URL[http://ir.sia.cn/handle/173321/20843]  
专题沈阳自动化研究所_机器人学研究室
作者单位1.Department of Electrical and Computer Engineering, University of Pittsburgh, Pittsburgh, PA, 15261, United States
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
3.University of Chinese Academy of Sciences, Beijing 100049, China
推荐引用方式
GB/T 7714		 Liu LQ,Shi JL,Yu P,et al. Phase mode nanomachining on ultra-thin films with atomic force microscopy[J]. Materials Letters,2017,209:437-440.
APA Liu LQ,Shi JL,Yu P,&Li GY.(2017).Phase mode nanomachining on ultra-thin films with atomic force microscopy.Materials Letters,209,437-440.
MLA Liu LQ,et al."Phase mode nanomachining on ultra-thin films with atomic force microscopy".Materials Letters 209(2017):437-440.

入库方式： OAI收割

来源：沈阳自动化研究所

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