Hardness determination at nanoscale by ultrasonic vibration-assisted AFM
文献类型：会议论文
| 作者 | Shi JL(施佳林) ; Yu P(于鹏); Liu LQ(刘连庆); Cong Y(丛杨)
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| 出版日期 | 2017 |
| 会议名称 | 1st International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 |
| 会议日期 | July 17-21, 2017 |
| 会议地点 | Montreal, Canada |
| 关键词 | atomic force microscopy nanomachining thin film mechanical properties |
| 页码 | 1-5 |
| 通讯作者 | Liu LQ(刘连庆) |
| 中文摘要 | Mechanical properties at nanoscale are crucial fators in the applications such as nanoscale interconnects and active components in electronic, optoelectronic, and electromechanical devices. Determination of the hardness of nanostructures, especially nano-thin-film, with regime from several to hundreds nanometers is a challenge. In this study, we proposed an ultrasonic vibration (USV)-assisted atomic force microscopy (AFM) method to measure the hardness of bulk materials and nano-thin-film with the thickness of 25 and hundreds nanometers. The hardness properties of material can be detected by the cantilever phase response in the USV machining process. By recording the depth-phase data, the hardness information can be extracted through fitting the data by the mathematical model. The theoretical analysis and experimental results valid the proposed method. |
| 收录类别 | EI |
| 产权排序 | 1 |
| 会议录 | International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | New York |
| 语种 | 英语 |
| ISBN号 | 978-1-5386-0346-8 |
| 源URL | [http://ir.sia.cn/handle/173321/21073]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 作者单位 | 1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110016, China 2.University of Chinese Academy of Sciences, Beijing, 100049, China |
| 推荐引用方式 GB/T 7714 | Shi JL,Yu P,Liu LQ,et al. Hardness determination at nanoscale by ultrasonic vibration-assisted AFM[C]. 见:1st International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017. Montreal, Canada. July 17-21, 2017. |
入库方式： OAI收割
来源：沈阳自动化研究所
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