Snapshot multi-wavelength interference microscope
文献类型：期刊论文
| 作者 | Pau, Stanley3; Spires, Oliver3; Zhang JC(张俊超)2; Tu, Xingzhou3; Tian, Xiaobo3; Liang, Rongguang3; Brock, Neal1; Rong SB(荣胜波) ; Huang YZ(黄益泽); Zhang HY(张环宇)
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| 刊名 | Optics Express
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| 出版日期 | 2018 |
| 卷号 | 26期号:14页码:18279-18291 |
| ISSN号 | 1094-4087 |
| 产权排序 | 2 |
| 通讯作者 | Liang, Rongguang |
| 中文摘要 | A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths. |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000438209100056 |
| 源URL | [http://ir.sia.cn/handle/173321/22210]  |
| 专题 | 沈阳自动化研究所_数字工厂研究室 |
| 作者单位 | 1.4D Technology Corporation, Tucson AZ 85706, United States 2.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China 3.College of Optics Science, University of Arizona, Tucson, AZ 85721, United States |
| 推荐引用方式 GB/T 7714 | Pau, Stanley,Spires, Oliver,Zhang JC,et al. Snapshot multi-wavelength interference microscope[J]. Optics Express,2018,26(14):18279-18291. |
| APA | Pau, Stanley.,Spires, Oliver.,Zhang JC.,Tu, Xingzhou.,Tian, Xiaobo.,...&朱军.(2018).Snapshot multi-wavelength interference microscope.Optics Express,26(14),18279-18291. |
| MLA | Pau, Stanley,et al."Snapshot multi-wavelength interference microscope".Optics Express 26.14(2018):18279-18291. |
入库方式： OAI收割
来源：沈阳自动化研究所
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