Fabrication of bottom fillet nano-mold to increase the mold lifetime
文献类型：期刊论文
| 作者 | Lu BL(鲁伯林) ; Cheng, E.; Sun, Lei; Zou, Helin; Yin, Zhifu
|
| 刊名 | Journal of Nanoscience and Nanotechnology
 |
| 出版日期 | 2017 |
| 卷号 | 17期号:12页码:8975-8980 |
| 关键词 | Numerical Simulation PDMS Nano-Mold PECVD SiNx |
| ISSN号 | 1533-4880 |
| 产权排序 | 2 |
| 通讯作者 | Zou, Helin |
| 中文摘要 | T-NIL (Thermal imprint lithography) is a promising technology to fabricate low-cost, high-throughput, and high resolution nano-structures in the polymer substrates. However, the foremost issues during T-NIL are the development of a low-cost and concise nano-mold fabrication method and improvement of the nano-mold lifetime. In this paper, the stress distribution in the nano-mold was studied by numerical simulation method and the fracture mechanism of the nano-mold was proposed. According to the simulation results, a fillet in the bottom of the nano-mold can significantly increase the lifetime of the nano-mold. Therefore, a top fillet SiNxnano-mold with low-cost was fabricated by SiNxdeposition method, and then the bottom fillet PDMS nano-mold with 330 nm wide and 1.3 μm deep nanochannels was replicated by casting mold method. During SiNxdeposition, the ratio of high frequency and low frequency and deposition temperature were optimized. The SiNxfilm with small compressive stress of 75.7 MPa can be deposited on the Si substrate. |
| WOS标题词 | Science & Technology ; Physical Sciences ; Technology |
| 类目[WOS] | Chemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter |
| 研究领域[WOS] | Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics |
| 关键词[WOS] | UV-NANOIMPRINT LITHOGRAPHY ; NANOCHANNEL FABRICATION ; NANOFLUIDIC CHANNEL ; SI-MOLD ; SILICON ; STRESS ; FILMS |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000417111000038 |
| 源URL | [http://ir.sia.cn/handle/173321/21098]  |
| 专题 | 沈阳自动化研究所_智能检测与装备研究室 |
| 作者单位 | 1.School of Mechanical Engineering, Hebei University of Technology, Tianjin, 300132, China 2.School of Mechanical Science and Engineering, Jilin University, Changchun, 130012, China 3.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110179, China 4.Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology, Dalian, 116024, China |
| 推荐引用方式 GB/T 7714 | Lu BL,Cheng, E.,Sun, Lei,et al. Fabrication of bottom fillet nano-mold to increase the mold lifetime[J]. Journal of Nanoscience and Nanotechnology,2017,17(12):8975-8980. |
| APA | Lu BL,Cheng, E.,Sun, Lei,Zou, Helin,&Yin, Zhifu.(2017).Fabrication of bottom fillet nano-mold to increase the mold lifetime.Journal of Nanoscience and Nanotechnology,17(12),8975-8980. |
| MLA | Lu BL,et al."Fabrication of bottom fillet nano-mold to increase the mold lifetime".Journal of Nanoscience and Nanotechnology 17.12(2017):8975-8980. |
入库方式： OAI收割
来源：沈阳自动化研究所
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