Normal tracing deflectometry using a secondary light source
文献类型：期刊论文
| 作者 | Peng, CQ; He, YM; Wang, J |
| 刊名 | JOURNAL OF SYNCHROTRON RADIATION
 |
| 出版日期 | 2017 |
| 卷号 | 24期号:-页码:765-774 |
| 关键词 | Surface Profiler Accuracy Mirrors |
| ISSN号 | 1600-5775 |
| DOI | 10.1107/S1600577517007135 |
| 文献子类 | 期刊论文 |
| 英文摘要 | Scanning deflectometric profilers based on an f-theta system are typical optical tools used to measure mirror profiles at many synchrotron facilities. Unlike these profilers, which are based on a pencil beam, here a secondary light source and a pinhole are used to construct a system that automatically selects a beam that will always pass through the pinhole and propagate along the normal direction of the measured area on the surface under test. By measuring the angle variation of the selected beam, slope variations of the surface under test can be measured. Systematic errors introduced by manufacturing defects or aberrations of an optical element, which greatly degrade the performance of traditional profilers, could be minimized by using the developed method. Simulation values of the proposed method and a conventional method are compared. |
| WOS关键词 | SURFACE PROFILER ; ACCURACY ; MIRRORS |
| 语种 | 英语 |
| WOS记录号 | WOS:000404629100006 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/28748]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 推荐引用方式 GB/T 7714 | Peng, CQ,He, YM,Wang, J. Normal tracing deflectometry using a secondary light source[J]. JOURNAL OF SYNCHROTRON RADIATION,2017,24(-):765-774. |
| APA | Peng, CQ,He, YM,&Wang, J.(2017).Normal tracing deflectometry using a secondary light source.JOURNAL OF SYNCHROTRON RADIATION,24(-),765-774. |
| MLA | Peng, CQ,et al."Normal tracing deflectometry using a secondary light source".JOURNAL OF SYNCHROTRON RADIATION 24.-(2017):765-774. |
入库方式： OAI收割
来源：上海应用物理研究所
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