The fabrication of Au nanowire by phase-control mode of USV-assisted AFM nanomachining
文献类型：会议论文
| 作者 | Shi JL(施佳林)1,2 ; Yu P(于鹏)2; Cong Y(丛杨)2; Liu LQ(刘连庆)2
|
| 出版日期 | 2017 |
| 会议日期 | December 5-8, 2017 |
| 会议地点 | Macau, China |
| 关键词 | AFM nanomachining ultrasonic vibration nanowire fabrication |
| 页码 | 1124-1129 |
| 英文摘要 | This paper proposed Au nanowire fabrication method combining the phase-control mode of nanomachining and the lift-off process. The conventional force-control mode of AFM nanomachining has many drawbacks such as stick-slip motion of machining, unable to directly control the machining depth, under-cutting and over-cutting. These drawbacks will lead to invalid nanopattern of resist or severe tip wear. The phase-control mode can avoid these drawbacks of conventional force-control mode. After patterning the nanogrooves by phase-control mode nanomachinng, the lift-off process is utilized to fabricate Au nanowire. Experimental result shows that width of fabricated nanowire is ∼ 50 nm. The present method also demonstrates the potential on the fabrication of three-dimension nanostructures and nanoelectronic device. |
| 源文献作者 | Beijing Institute of Technology ; City University of Hong Kong ; IEEE Robotics and Automation Society ; Shenzhen Academy of Robotics ; University of Hong Kong ; University of Macau |
| 产权排序 | 1 |
| 会议录 | Proceedings of the 2017 IEEE International Conference on Robotics and Biomimetics
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | New York |
| 语种 | 英语 |
| ISBN号 | 978-1-5386-3741-8 |
| 源URL | [http://ir.sia.cn/handle/173321/22131]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 通讯作者 | Liu LQ(刘连庆) |
| 作者单位 | 1.University of Chinese Academy of Sciences, Beijing 100049, China 2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China |
| 推荐引用方式 GB/T 7714 | Shi JL,Yu P,Cong Y,et al. The fabrication of Au nanowire by phase-control mode of USV-assisted AFM nanomachining[C]. 见:. Macau, China. December 5-8, 2017. |
入库方式： OAI收割
来源：沈阳自动化研究所
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