A General Throughput Model for Parallel Cluster tools
文献类型：会议论文
| 作者 | Hu JT(胡静涛)1,2 ; Zheng XH(郑秀红)1,2,3; Yu HB(于海斌)2
|
| 出版日期 | 2010 |
| 会议日期 | Augest 20-22, 2010 |
| 会议地点 | Yangzhou, CHINA |
| 关键词 | parallel cluster tools throughput model timing diagram |
| 页码 | 341-344 |
| 英文摘要 | To effectively evaluate and analyze performance of cluster tools in semiconductor manufacturing, the paper presents a throughput model for parallel cluster tools.For developping this model, the timing diagram is applied to describe the usage of the chamber and robot in parallel processing of cluster tools. Finally, the theoretical model which indicates the relationship between the number of chamber, processing time, transport time, and throughtput is deduced. This model can analyze and computer the wafer period and the batch period fast and accurately. |
| 源文献作者 | IEEE Technol Management Council, Yangzhou Univ, Intelligent Informat Technol Appl Res Assoc, Jiangsu Comp Fed, Yangzhou Assoc Sci & Techynol |
| 产权排序 | 1 |
| 会议录 | 2010 INTERNATIONAL COLLOQUIUM ON COMPUTING, COMMUNICATION, CONTROL, AND MANAGEMENT (CCCM2010), VOL I
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | New York |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-7380-9 |
| WOS记录号 | WOS:000393717600089 |
| 源URL | [http://ir.sia.cn/handle/173321/24116]  |
| 专题 | 沈阳自动化研究所_工业信息学研究室 |
| 通讯作者 | Zheng XH(郑秀红) |
| 作者单位 | 1.Graduate School of the Chinese Academy of Sciences, CAS, Beijing 100039, China 2.Key Laboratory of Industrial Informatics, Shenyang Institute of Automation, CAS, Shenyang 110016, China 3.School of Computer Science and Technology, Shenyang Institute of Chemical Technology, Shenyang, 110142, China |
| 推荐引用方式 GB/T 7714 | Hu JT,Zheng XH,Yu HB. A General Throughput Model for Parallel Cluster tools[C]. 见:. Yangzhou, CHINA. Augest 20-22, 2010. |
入库方式： OAI收割
来源：沈阳自动化研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。