中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Snapshot multi-wavelength interference microscope

文献类型:期刊论文

作者Tian, Xiaobo2; Liang, Rongguang2; Pau, Stanley2; Brock, Neal1; Spires, Oliver2; Zhang JC(张俊超)3; Tu, Xingzhou2
刊名Optics Express
出版日期2018
卷号26期号:14页码:18279-18291
ISSN号1094-4087
产权排序2
英文摘要

A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths.

语种英语
WOS记录号WOS:000438209100056
资助机构National Science Foundation (NSF) (1455630, 1607358) ; National Institutes of Health (NIH) (S10OD018061) ; and TRIF Space Exploration & Optical Sciences (SEOS).
源URL[http://119.78.100.139/handle/173321/22152]  
专题沈阳自动化研究所_光电信息技术研究室
通讯作者Liang, Rongguang
作者单位1.4D Technology Corporation, Tucson AZ 85706, United States
2.College of Optics Science, University of Arizona, Tucson, AZ 85721, United States
3.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
推荐引用方式
GB/T 7714
Tian, Xiaobo,Liang, Rongguang,Pau, Stanley,et al. Snapshot multi-wavelength interference microscope[J]. Optics Express,2018,26(14):18279-18291.
APA Tian, Xiaobo.,Liang, Rongguang.,Pau, Stanley.,Brock, Neal.,Spires, Oliver.,...&Tu, Xingzhou.(2018).Snapshot multi-wavelength interference microscope.Optics Express,26(14),18279-18291.
MLA Tian, Xiaobo,et al."Snapshot multi-wavelength interference microscope".Optics Express 26.14(2018):18279-18291.

入库方式: OAI收割

来源:沈阳自动化研究所

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