Snapshot multi-wavelength interference microscope
文献类型:期刊论文
作者 | Tian, Xiaobo2; Liang, Rongguang2; Pau, Stanley2; Brock, Neal1; Spires, Oliver2; Zhang JC(张俊超)3![]() |
刊名 | Optics Express
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出版日期 | 2018 |
卷号 | 26期号:14页码:18279-18291 |
ISSN号 | 1094-4087 |
产权排序 | 2 |
英文摘要 | A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths. |
语种 | 英语 |
WOS记录号 | WOS:000438209100056 |
资助机构 | National Science Foundation (NSF) (1455630, 1607358) ; National Institutes of Health (NIH) (S10OD018061) ; and TRIF Space Exploration & Optical Sciences (SEOS). |
源URL | [http://119.78.100.139/handle/173321/22152] ![]() |
专题 | 沈阳自动化研究所_光电信息技术研究室 |
通讯作者 | Liang, Rongguang |
作者单位 | 1.4D Technology Corporation, Tucson AZ 85706, United States 2.College of Optics Science, University of Arizona, Tucson, AZ 85721, United States 3.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China |
推荐引用方式 GB/T 7714 | Tian, Xiaobo,Liang, Rongguang,Pau, Stanley,et al. Snapshot multi-wavelength interference microscope[J]. Optics Express,2018,26(14):18279-18291. |
APA | Tian, Xiaobo.,Liang, Rongguang.,Pau, Stanley.,Brock, Neal.,Spires, Oliver.,...&Tu, Xingzhou.(2018).Snapshot multi-wavelength interference microscope.Optics Express,26(14),18279-18291. |
MLA | Tian, Xiaobo,et al."Snapshot multi-wavelength interference microscope".Optics Express 26.14(2018):18279-18291. |
入库方式: OAI收割
来源:沈阳自动化研究所
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