Design and implementation of FA networking control software that accords with SEMI standards
文献类型：会议论文
| 作者 | Liu MZ(刘明哲) ; Wang CX(王晨曦); Xu AD(徐皑冬); Jin N(金妮)
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| 出版日期 | 2018 |
| 会议日期 | November 2-4, 2018 |
| 会议地点 | Qingdao, China |
| 关键词 | IC equipment SEMI FA |
| 页码 | 117-120 |
| 英文摘要 | As the complexity of the semiconductor process becomes more and more complex. The types and functions of production equipment involved in the semiconductor industry are also increasing. This paper studies and analyzes SEMI E5, E37, E30, E39, E40, E94, E87, E90, E84 and other related standards. Design and develop networked control software for equipment and plant automation (FA) system according to SEMI international standards. |
| 产权排序 | 1 |
| 会议录 | ICCIP 2018 - Proceedings of 2018 4th International Conference on Communication and Information Processing
 |
| 会议录出版者 | ACM |
| 会议录出版地 | New York |
| 语种 | 英语 |
| ISBN号 | 978-1-4503-6534-5 |
| 源URL | [http://ir.sia.cn/handle/173321/24390]  |
| 专题 | 沈阳自动化研究所_工业控制网络与系统研究室 |
| 通讯作者 | Jin N(金妮) |
| 作者单位 | Key Laboratory of Networked Control Systems, Chinese Academy of Sciences, Shenyang Institute of Automation, China |
| 推荐引用方式 GB/T 7714 | Liu MZ,Wang CX,Xu AD,et al. Design and implementation of FA networking control software that accords with SEMI standards[C]. 见:. Qingdao, China. November 2-4, 2018. |
入库方式： OAI收割
来源：沈阳自动化研究所
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