Interference-aided spectrum-fitting method for accurate film thickness determination
文献类型：期刊论文
| 作者 | Liu, Xingxing1,2,3; Wang, Shaowei1,2; Xia, Hui1; Zhang, Xutao1,3; Ji, Ruonan1,2,3; Li, Tianxin1,2; Lu, Wei1,2 |
| 刊名 | Chinese optics letters
 |
| 出版日期 | 2016-08-10 |
| 卷号 | 14期号:8页码:5 |
| ISSN号 | 1671-7694 |
| DOI | 10.3788/col201614.081203 |
| 通讯作者 | Wang, shaowei(wangshw@mail.sitp.ac.cn) |
| 英文摘要 | A new approach is proposed to accurately determine the thickness of films, especially for ultra-thin films, through spectrum-fitting with the assistance of an interference layer. the determination limit can reach even less than 1 nm. its accuracy is far better than that of the traditional methods. this determination method is verified by experiments, and the determination limit is at least 3.5 nm compared with the results of atomic force microscope (afm). furthermore, a double interference-aided spectra fitting method is proposed to reduce the requirements of the determination instruments, which thus allows one to determine the film's thickness with a low-precision common spectrometer and to greatly lower the cost. it is a very high-precision determination method for on-site and in-situ applications, especially for ultra-thin films. |
| WOS关键词 | OPTICAL CHARACTERIZATION ; THIN ; TRANSMITTANCE ; ALGORITHM ; CONSTANTS ; COATINGS |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| 出版者 | CHINESE LASER PRESS |
| WOS记录号 | WOS:000382513100010 |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2375267 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Wang, Shaowei |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China 2.Shanghai Engn Res Ctr Energy Saving Coatings, Shanghai 200083, Peoples R China 3.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liu, Xingxing,Wang, Shaowei,Xia, Hui,et al. Interference-aided spectrum-fitting method for accurate film thickness determination[J]. Chinese optics letters,2016,14(8):5. |
| APA | Liu, Xingxing.,Wang, Shaowei.,Xia, Hui.,Zhang, Xutao.,Ji, Ruonan.,...&Lu, Wei.(2016).Interference-aided spectrum-fitting method for accurate film thickness determination.Chinese optics letters,14(8),5. |
| MLA | Liu, Xingxing,et al."Interference-aided spectrum-fitting method for accurate film thickness determination".Chinese optics letters 14.8(2016):5. |
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来源：中国科学院大学
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