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Investigation of the precision of curved surface fitting in the measurement of near-cylindrical surfaces' mid-wavelength deformations

文献类型:期刊论文

作者Xie, BC; Lu, ZW; Li, FY
刊名Acta physica sinica
出版日期2005-07-01
卷号54期号:7页码:3144-3148
关键词Optical testing Near-cylindrical surfaces Curved surface fitting
ISSN号1000-3290
通讯作者Xie, bc()
英文摘要The application of curved surface fitting for the disposal of the wavefront aberrations got in the measurement of certain paraboloid and hyperboloid is studied. it is found that, for mid-wavelength deformations with an amplitude of 0.1 lambda, results can be obtained with rms error smaller than 0.015 lambda and 0.013 lambda separately. the existence of a special fitting order which leads to the smallest rms error is affirmed. to find out the special fitting order, we work out two methods which help us get the order's value successfully.
WOS研究方向Physics
WOS类目Physics, Multidisciplinary
语种英语
WOS记录号WOS:000230231700030
出版者CHINESE PHYSICAL SOC
URI标识http://www.irgrid.ac.cn/handle/1471x/2377803
专题中国科学院大学
通讯作者Xie, BC
作者单位1.Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, State Key Lab Appl Opt, Changchun 130033, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式
GB/T 7714
Xie, BC,Lu, ZW,Li, FY. Investigation of the precision of curved surface fitting in the measurement of near-cylindrical surfaces' mid-wavelength deformations[J]. Acta physica sinica,2005,54(7):3144-3148.
APA Xie, BC,Lu, ZW,&Li, FY.(2005).Investigation of the precision of curved surface fitting in the measurement of near-cylindrical surfaces' mid-wavelength deformations.Acta physica sinica,54(7),3144-3148.
MLA Xie, BC,et al."Investigation of the precision of curved surface fitting in the measurement of near-cylindrical surfaces' mid-wavelength deformations".Acta physica sinica 54.7(2005):3144-3148.

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来源:中国科学院大学

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