Modeling analysis of gradient-index coatings prepared by reactive magnetron sputtering
文献类型：期刊论文
| 作者 | Shen, ZC; Shao, JD; Wang, YJ; Fan, ZX |
| 刊名 | Acta physica sinica
 |
| 出版日期 | 2005-10-01 |
| 卷号 | 54期号:10页码:4842-4845 |
| 关键词 | Gradient-index Reactive magnetron sputtering Modeling |
| ISSN号 | 1000-3290 |
| 通讯作者 | Shen, zc(zicaishen@163.com) |
| 英文摘要 | The formation mechanism of gradient-index coatings by reactive magnetron sputtering is discussed. a practical modeling of gradient-index coatings is proposed, the relationship between refractive index of coatings and pressure of reactive gas is established. next, we discussed the changing rule of partial-pressure of reactive gas with time requived for obtaining a desired refractive index of gradient coatings under specific deposition conditions. a linear coating is taken as example to illustrate how to get the relationship between partial-pressure of reactive gas and time. |
| WOS关键词 | RUGATE FILTERS ; MIXTURES |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000232443100065 |
| 出版者 | CHINESE PHYSICAL SOC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2378350 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Shen, ZC |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Shen, ZC,Shao, JD,Wang, YJ,et al. Modeling analysis of gradient-index coatings prepared by reactive magnetron sputtering[J]. Acta physica sinica,2005,54(10):4842-4845. |
| APA | Shen, ZC,Shao, JD,Wang, YJ,&Fan, ZX.(2005).Modeling analysis of gradient-index coatings prepared by reactive magnetron sputtering.Acta physica sinica,54(10),4842-4845. |
| MLA | Shen, ZC,et al."Modeling analysis of gradient-index coatings prepared by reactive magnetron sputtering".Acta physica sinica 54.10(2005):4842-4845. |
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来源：中国科学院大学
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