Thermally driven micro-electrostatic fieldmeter
文献类型：期刊论文
| 作者 | Chen, Xianxiang; Peng, Chunrong; Tao, Hu; Ye, Chao; Bai, Qiang; Chen, Shaofeng; Xia, Shanhong |
| 刊名 | Sensors and actuators a-physical
 |
| 出版日期 | 2006-11-20 |
| 卷号 | 132期号:2页码:677-682 |
| 关键词 | Mems Micro-electrostatic fieldmeter Thermal actuator Correlation detection |
| ISSN号 | 0924-4247 |
| DOI | 10.1016/j.sna.2006.02.044 |
| 通讯作者 | Xia, shanhong(shxia@mail.ie.ac.cn) |
| 英文摘要 | A thermally driven micro-electrostatic fieldmeter is reported, which mainly consists of sense electrodes, grounded shuttle electrodes, bent beam thermal driver, etc. the bent beam thermal driver is driven with a square wave of amplitude as low as 2 v amplitude and of frequency as high as 20 khz. the electric field intensity resolution of the electrostatic fieldmeter can reach 240.8 v/m. (c) 2006 elsevier b.v. all rights reserved. |
| WOS关键词 | BEAM ELECTROTHERMAL ACTUATORS ; SENSORS |
| WOS研究方向 | Engineering ; Instruments & Instrumentation |
| WOS类目 | Engineering, Electrical & Electronic ; Instruments & Instrumentation |
| 语种 | 英语 |
| WOS记录号 | WOS:000242513900032 |
| 出版者 | ELSEVIER SCIENCE SA |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2379259 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Xia, Shanhong |
| 作者单位 | 1.Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Chen, Xianxiang,Peng, Chunrong,Tao, Hu,et al. Thermally driven micro-electrostatic fieldmeter[J]. Sensors and actuators a-physical,2006,132(2):677-682. |
| APA | Chen, Xianxiang.,Peng, Chunrong.,Tao, Hu.,Ye, Chao.,Bai, Qiang.,...&Xia, Shanhong.(2006).Thermally driven micro-electrostatic fieldmeter.Sensors and actuators a-physical,132(2),677-682. |
| MLA | Chen, Xianxiang,et al."Thermally driven micro-electrostatic fieldmeter".Sensors and actuators a-physical 132.2(2006):677-682. |
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来源：中国科学院大学
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