Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement
文献类型：期刊论文
| 作者 | He, Guotian1,3; Wang, Xiangzhao1; Zeng, Aijun2; Tang, Feng1 |
| 刊名 | Chinese optics letters
 |
| 出版日期 | 2007-03-10 |
| 卷号 | 5期号:3页码:164-167 |
| ISSN号 | 1671-7694 |
| 通讯作者 | He, guotian(slhgt@siom.ac.cn) |
| 英文摘要 | A sinusoidal phase-modulating (spm) laser diode (ld) interferometer for real-time surface profile measurement is proposed and its principle is analyzed. the phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. for 60 x 60 measurement points of the surface profile, the measuring time is 10 ins. a root mean square (rms) measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm. |
| WOS关键词 | CONJUGATE MIRROR ; WAVELENGTH |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000255023400012 |
| 出版者 | SCIENCE CHINA PRESS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2380184 |
| 专题 | 中国科学院大学 |
| 通讯作者 | He, Guotian |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Shanghai Hengyi Opt & Fine Mech Co Ltd, Shanghai 201800, Peoples R China 3.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | He, Guotian,Wang, Xiangzhao,Zeng, Aijun,et al. Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement[J]. Chinese optics letters,2007,5(3):164-167. |
| APA | He, Guotian,Wang, Xiangzhao,Zeng, Aijun,&Tang, Feng.(2007).Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement.Chinese optics letters,5(3),164-167. |
| MLA | He, Guotian,et al."Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement".Chinese optics letters 5.3(2007):164-167. |
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来源：中国科学院大学
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