Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering
文献类型:期刊论文
作者 | Zhang, Bin1,2; Yu, Yuanlie1,2; Wang, Zhou1,2; Zhang, Junyan1 |
刊名 | Applied surface science
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出版日期 | 2010-09-01 |
卷号 | 256期号:22页码:6506-6511 |
关键词 | Nanocolumn structure Nanoporous structure Field emission properties |
ISSN号 | 0169-4332 |
DOI | 10.1016/j.apsusc.2010.04.002 |
通讯作者 | Zhang, junyan(zhangjunyan@lzb.ac.cn) |
英文摘要 | Different nitrogen doped amorphous carbon (cnx) films were obtained by magnetron sputtering of carbon target in argon and nitrogen atmosphere at the increasing negative bias voltages from 0 to 150 v. the films structures have experienced great change, from the novel column to nanoporous structure at the bias voltage of 0v to the porous structure at 150 v. the proposed growth process was that the cnx nuclei grew at 0v acted as the "seeds" for the growth of the nanocolumns, and ion etching effects at 150v induced the formation of nanoporous structures. furthermore, a comparison study showed that the field emission properties of the cnx films were related with the introduction of the nitrogen atoms, the size and concentration of sp(2) c clusters and the surface roughness. the films with rougher surface have lower threshold field. (c) 2010 elsevier b.v. all rights reserved. |
WOS关键词 | CYCLOTRON-RESONANCE-PLASMA ; FIELD-EMISSION ; NITRIDE FILMS ; RAMAN-SPECTRA ; THIN-FILMS ; GRAPHITE ; NANOTUBES ; SILICON ; GROWTH |
WOS研究方向 | Chemistry ; Materials Science ; Physics |
WOS类目 | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
语种 | 英语 |
WOS记录号 | WOS:000278908900004 |
出版者 | ELSEVIER SCIENCE BV |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2406844 |
专题 | 中国科学院大学 |
通讯作者 | Zhang, Junyan |
作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
推荐引用方式 GB/T 7714 | Zhang, Bin,Yu, Yuanlie,Wang, Zhou,et al. Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering[J]. Applied surface science,2010,256(22):6506-6511. |
APA | Zhang, Bin,Yu, Yuanlie,Wang, Zhou,&Zhang, Junyan.(2010).Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering.Applied surface science,256(22),6506-6511. |
MLA | Zhang, Bin,et al."Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering".Applied surface science 256.22(2010):6506-6511. |
入库方式: iSwitch采集
来源:中国科学院大学
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