中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering

文献类型:期刊论文

作者Zhang, Bin1,2; Yu, Yuanlie1,2; Wang, Zhou1,2; Zhang, Junyan1
刊名Applied surface science
出版日期2010-09-01
卷号256期号:22页码:6506-6511
关键词Nanocolumn structure Nanoporous structure Field emission properties
ISSN号0169-4332
DOI10.1016/j.apsusc.2010.04.002
通讯作者Zhang, junyan(zhangjunyan@lzb.ac.cn)
英文摘要Different nitrogen doped amorphous carbon (cnx) films were obtained by magnetron sputtering of carbon target in argon and nitrogen atmosphere at the increasing negative bias voltages from 0 to 150 v. the films structures have experienced great change, from the novel column to nanoporous structure at the bias voltage of 0v to the porous structure at 150 v. the proposed growth process was that the cnx nuclei grew at 0v acted as the "seeds" for the growth of the nanocolumns, and ion etching effects at 150v induced the formation of nanoporous structures. furthermore, a comparison study showed that the field emission properties of the cnx films were related with the introduction of the nitrogen atoms, the size and concentration of sp(2) c clusters and the surface roughness. the films with rougher surface have lower threshold field. (c) 2010 elsevier b.v. all rights reserved.
WOS关键词CYCLOTRON-RESONANCE-PLASMA ; FIELD-EMISSION ; NITRIDE FILMS ; RAMAN-SPECTRA ; THIN-FILMS ; GRAPHITE ; NANOTUBES ; SILICON ; GROWTH
WOS研究方向Chemistry ; Materials Science ; Physics
WOS类目Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
语种英语
WOS记录号WOS:000278908900004
出版者ELSEVIER SCIENCE BV
URI标识http://www.irgrid.ac.cn/handle/1471x/2406844
专题中国科学院大学
通讯作者Zhang, Junyan
作者单位1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式
GB/T 7714
Zhang, Bin,Yu, Yuanlie,Wang, Zhou,et al. Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering[J]. Applied surface science,2010,256(22):6506-6511.
APA Zhang, Bin,Yu, Yuanlie,Wang, Zhou,&Zhang, Junyan.(2010).Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering.Applied surface science,256(22),6506-6511.
MLA Zhang, Bin,et al."Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering".Applied surface science 256.22(2010):6506-6511.

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来源:中国科学院大学

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